A Measuring Device for Temperature Drift Coefficient of Eddy Current Displacement Sensor

Abstract

The invention discloses a measuring device for the temperature drift coefficient of an eddy current displacement sensor. The device uses a gasket with an ultra-low thermal expansion coefficient, a probe fixing structure made of common materials, an elastic body, a target conductor sheet, a bracket and a base to form a Very precise and stable displacement fixing system. Different from the temperature drift measurement devices made of low-temperature drift Invar alloy and other materials in the past, the main body of this device can be a common material that is cheap and easy to process and manufacture, and the gasket that determines the displacement is made of low thermal expansion coefficient material manufacturing. The device of the invention can be used to accurately measure the temperature drift of the high-resolution eddy current displacement sensor, and can also be installed with a precision displacement brake to calibrate the sensitivity and linearity and the like. The temperature coefficient measuring device of the eddy current sensor based on the present invention has simple structure and low cost, and the fixed displacement temperature drift coefficient can be as low as below 1nm / °C.

Description

technical field [0001] The invention relates to the measurement of the temperature drift coefficient of a displacement sensor, in particular to a measuring device for the temperature drift coefficient of an eddy current displacement sensor. Background technique [0002] Eddy current sensors have been widely used in various industrial applications and scientific research because they can work in various harsh environments. Compared with the high sensitivity of capacitive displacement sensors and optical displacement sensors to various environmental parameters, eddy current sensors can work in many extreme environments, such as high temperature, low temperature, or polluted environment, even in some liquid environments. However, in some high-precision displacement measurements, the relatively large temperature drift coefficient of eddy current displacement sensors limits its application. In order to give the temperature drift coefficient index of the eddy current sensor, or t...

AI Technical Summary

Problems solved by technology

Existing eddy current displacement sensor temperature coefficient measuring devices are expensive and complicated

And the existing temperature coefficient measuring device does not consider the thermal expansion coefficient of the bracket itself, so the system itself has a temperature coefficient, resulting in inaccurate measured temperature coefficient; or directly use Invar alloy and other materials with low thermal expansion coefficient to make the probe and fix the target system, expensive

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