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A kind of preparation method of self-supporting graphite-like porous amorphous carbon film

An amorphous carbon, self-supporting technology, applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of high ambient temperature, inability to obtain porous structure carbon films, and inability to obtain self-supporting amorphous carbon films And other issues

Inactive Publication Date: 2016-08-17
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

[0004] In view of the above defects or improvement needs of the prior art, the present invention provides a preparation method of self-supporting graphite porous amorphous carbon film, the purpose of which is to solve the problem of high ambient temperature and inability to obtain porous structure carbon in the preparation method of the prior art. Thin films and technical problems of not being able to obtain self-supporting amorphous carbon films

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  • A kind of preparation method of self-supporting graphite-like porous amorphous carbon film
  • A kind of preparation method of self-supporting graphite-like porous amorphous carbon film
  • A kind of preparation method of self-supporting graphite-like porous amorphous carbon film

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[0026] The amorphous carbon film prepared by the preparation method of the amorphous carbon film with graphite-like structure provided by the present invention has the characteristics of self-supporting, transparent and porous structure, and the thickness can be controlled from tens of nanometers to hundreds of nanometers. This provides a new way for the preparation of amorphous carbon thin films. The method includes: cleaning the substrate metal nickel sheet, heating the nickel sheet by feeding hydrogen gas at a temperature not lower than 600°C in a tube furnace, feeding hydrocarbon gas at a temperature not lower than 600°C for growth, Cool down and etch the nickel sheet with ferric chloride solution to form an amorphous carbon film. Compared with the current technology of amorphous carbon film preparation, the present invention has the following advantages: (1) simple equipment and low cost; (2) simple operation and fast preparation process; (3) self-supporting amorphous car...

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Abstract

The invention discloses a method for preparing a self-supporting graphite-like porous amorphous carbon film, which comprises the following steps: S1: ultrasonically cleaning the metal nickel sheet substrate, drying it and placing it in a tube furnace; Inert gas is passed into the tube furnace; S3: the temperature of the tube furnace is raised to 600°C-720°C, hydrogen is passed into the tube furnace, and the metal nickel sheet lining is heat treatment at the bottom; S4: feed hydrocarbons into the tube furnace, so that after the heat treatment, the metal nickel sheet substrate catalyzes the cracking of hydrocarbons and grows an amorphous carbon film; S5: heats the tube furnace The temperature is lowered, and the nickel sheet grown with the amorphous carbon film is soaked in an etching solution to corrode the substrate nickel sheet to obtain a self-supporting graphite-like porous amorphous carbon film. The preparation method of the invention does not require high ambient temperature, and the prepared amorphous carbon film has a porous structure and a self-supporting structure, and can be easily transferred to any substrate.

Description

technical field [0001] The invention belongs to the technical field of amorphous carbon films, and more specifically relates to a preparation method of self-supporting graphite-like porous amorphous carbon films. Background technique [0002] Amorphous carbon film is one of many carbon materials. Its research history can be traced back to the 18th century. Its performance was only studied in the 1940s, and its application began in the 1960s. There are three types of hybridization of carbon atoms in carbon materials: sp 3 hybridization, sp 2 hybridization and sp 1 Hybrid, the amorphous carbon film can be said to be a diamond (carbon atoms only have sp 3 hybrid) and graphite (carbon atoms only sp 2 hybrid) intermediate state of the structure. According to the hybridized carbon atoms sp 2 Unlike sp3 content, amorphous carbon films are generally classified into diamond-like amorphous carbon films (sp 3 Content>sp 2 content) and graphite-like amorphous carbon film (sp ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/26C23C16/52C23C16/56
Inventor 魏合林朱大明刘宇昊
Owner HUAZHONG UNIV OF SCI & TECH
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