Optical interferometer used for detecting inner surface of hollow cylinder

A hollow cylinder and optical interference technology, which is applied in the field of optical interferometer, can solve the problems of not being able to obtain the three-dimensional surface shape at one time, the influence of interferometer detection accuracy and reliability, and the deviation of detection shape, so as to improve the test efficiency and accuracy , Improve test efficiency, improve accuracy and reliability

Inactive Publication Date: 2014-03-05
苏州慧利仪器有限责任公司 +2
View PDF6 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, existing interferometers often detect deviations in surface shape, such as curved or partially curved or concave-convex areas. For the detection of three-dimensional surface shape, repeated inspections are required, and all

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Optical interferometer used for detecting inner surface of hollow cylinder
  • Optical interferometer used for detecting inner surface of hollow cylinder
  • Optical interferometer used for detecting inner surface of hollow cylinder

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Embodiment 1: An optical interferometer for detecting the inner surface of a hollow cylinder. The inner surface 1 is located along the circumference of the hollow cylinder 2 and located inside, and includes a laser 3, a condenser lens 4, a beam splitter 5, and an objective lens. A collimating convex lens 6, a standard flat crystal 7 and a conical mirror 8. The condensing convex lens 4 is located between the laser 3 and the collimating convex lens 6, and the focal point of the condensing convex lens 4 coincides with the focal point of the collimating convex lens 6; The beam lens 5 is located between the condensing convex lens 4 and the collimating convex lens 6, and is used to divide the light from the collimating convex lens 6 into a first beam and a second beam; the standard flat crystal 7 is located between the collimating convex lens 6 and the beam splitting lens 6 On the opposite side of the mirror 5, the surface of the standard flat crystal 7 opposite to the collimat...

Embodiment 2

[0032] Embodiment 2: An optical interferometer for detecting the inner surface of a hollow cylinder. The inner surface 1 is located along the circumference of the hollow cylinder 2 and located inside, and includes a laser 3, a condenser lens 4, a beam splitter 5, and an objective lens. A collimating convex lens 6, a standard flat crystal 7 and a conical mirror 8. The condensing convex lens 4 is located between the laser 3 and the collimating convex lens 6, and the focal point of the condensing convex lens 4 coincides with the focal point of the collimating convex lens 6; The beam lens 5 is located between the condensing convex lens 4 and the collimating convex lens 6, and is used to divide the light from the collimating convex lens 6 into a first beam and a second beam; the standard flat crystal 7 is located between the collimating convex lens 6 and the beam splitting lens 6 On the opposite side of the mirror 5, the surface of the standard flat crystal 7 opposite to the collimat...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses an optical interferometer used for detecting the inner surface of a hollow cylinder. The inner surface is located on the inner side or the outer side in the circumferential direction of the hollow cylinder, a condensation convex lens of the inner surface is located between a laser and a collimation convex lens, and the focus of the condensation convex lens and the focus of the collimation convex lens coincide; a beam splitter located between the condensation convex lens and the collimation convex lens is used for dividing light of an auto-collimation convex lens into a first light beam and a second light beam; a standard optical flat is located on one side, back to the beam splitter, of the collimation convex lens, the surface, facing the collimation convex lens, of the standard optical flat is a convex surface, and the surface, back to the convex surface, of the standard optical flat is a standard reference surface; a conical reflector is located in the hollow cylinder to be detected, and a rotary shaft of the conical reflector, the axis of the hollow cylinder and the axis of the standard optical flat coincide. According to the optical interferometer, feature information of the inner surface in the whole stereoscopic hollow cylinder can be obtained at a time, and test efficiency, accuracy and reliability are also greatly improved.

Description

Technical field [0001] The invention relates to an optical detection device, in particular to an optical interferometer for detecting the inner surface of a hollow cylinder. Background technique [0002] Optical interference technology is one of the most precise and effective testing technologies in modern times. It integrates the latest contemporary technology and widely adopts the latest achievements in computer technology, laser technology, electronic technology, semiconductor technology and other fields. It can quickly and accurately complete optical parts Check with the system. In today’s optical workshop, from the design, processing and inspection of optical parts to the assembly, calibration and testing of optical systems, the interferometer has become an indispensable test and inspection device that is easy to operate, reliable, high-precision, and intelligent. It plays an important role in the mass production and inspection of optical parts and systems. [0003] However,...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01B9/02
Inventor 韩森李雪园
Owner 苏州慧利仪器有限责任公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap