Substrate inspection device and transmission illumination device for substrate inspection device

Abstract

The invention relates to a substrate inspection device and a transmission illuminating device for the substrate inspection device. The substrate inspection device can prevent infrared light from an infrared light source from entering a camera without passing through the substrate, so that the substrate can be accurately inspected. The shape and arrangement of the infrared light source are set so that the field of view of the infrared light source of the charge-coupled device camera is covered by the field of view of the substrate of the charge-coupled device camera. Furthermore, by virtue of the Fresnel lens, the irradiation angle of the infrared light emitted from the light emitting diode element disposed near the edge of the infrared light source is deviated toward the edge direction of the substrate. In addition, the intensity of the infrared light irradiated from the infrared light source to the substrate on the edge region of the substrate is greater than the intensity of the infrared light on the central portion of the substrate.

Description

technical field [0001] The present invention relates to a substrate inspection device and a transillumination device for the substrate inspection device, and in particular to a substrate inspection device and a transillumination device for the substrate inspection device that use a substrate for a solar cell unit as an inspection object. Background technique [0002] Inspecting the shape of a fracture or a defect is performed on a substrate for a solar cell in a step before an electrode formation step in a manufacturing step of a solar cell, such as a receiving inspection step or a film-forming step of an antireflection film or after a film-forming step Inspection, inspection of particles attached to the substrate, pinholes of the anti-reflection film, surface condition inspection of uneven film thickness of the anti-reflection film, and inspection of microcracks generated inside the solar cell ( microcrack) or void (void) etc. internal inspection. [0003] Among them, when...

AI Technical Summary

Problems solved by technology

[0005] In this substrate inspection device, when the infrared light irradiated from the light source passes through the outside of the edge of the substrate and directly enters the camera without passing through the substrate, compared with the infrared light that enters the camera after passing through the substrate, it directly enters the camera. The intensity of the infrared light is extremely high, so the image captured by the camera becomes extremely bright near the edge of the substrate, making it difficult to recognize the infrared light transmitted through the substrate

Therefore, it is impossible to accurately identify microcracks, pores, etc. that occur inside the solar cell.

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