A sound sensor, an electroenterogram detection system and detection method based on the sound sensor
A sound sensor and detection system technology, applied in the direction of sensors, sensors, sensor types, etc., can solve the problems that are not widely used in the medical industry, unfavorable for doctors to judge lesions, and cannot be accurately located, so as to facilitate early diagnosis and treatment, and facilitate Effects of collecting and improving sensitivity
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[0027] Such as figure 1 with figure 2 Schematic diagrams of front and top views of the new acoustic sensor. Including the silicon substrate 101, the mass block 104 is left after the silicon substrate 101 is etched, the silicon substrate and the mass block are connected through the piezoelectric film 102, and the support structure 105 is also connected to the silicon substrate 101 and the mass block 104 together. The structural pattern and film thickness of the piezoelectric film 102 can be determined by analytical model method or finite element modeling method to ensure maximum sensitivity and sufficient strength. The structural pattern and size of the supporting structure 105 can also be determined by using an analytical model or a finite element modeling method to ensure sufficient supporting strength and sensitivity of the entire sensor.
[0028] Such as image 3 It is a schematic diagram of the sound sensor combination module and its placement. Schematic diagram of th...
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