A performance control method of multilayer metamaterial unit structure
A unit structure and metamaterial technology, applied in the field of metamaterials and terahertz detection, can solve the problems affecting the thermal, electrical and mechanical aspects of related devices, unfavorable practical application and theoretical research, and insufficient structure of terahertz metamaterials. Device application, easy control of response frequency, strong absorption effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0043] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0044] The multi-layer metamaterial structure composed of five layers of surface metal 5, upper dielectric 4, middle metal 3, lower dielectric 2, and bottom metal 1 provided by the present invention has special terahertz response performance. The present invention makes the embodiment of this multi-layer metamaterial structure as follows:
[0045] (1) Select a single crystal silicon wafer as the substrate of the metamaterial, after cleaning, dry it with high-purity nitrogen, and set it aside;
[0046] (2) On the surface of the substrate, use an electron beam evaporation system to deposit a continuous gold film with a thickness of 5-2000nm as the underlying metal 1 of the multilayer metamaterial;
[0047](3) Spin-coat a layer of polyimide film with a thickness of 50 nm to 40 μm on the surface of the above continuous gold film, as the lower medi...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com