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A performance control method of multilayer metamaterial unit structure

A unit structure and metamaterial technology, applied in the field of metamaterials and terahertz detection, can solve the problems affecting the thermal, electrical and mechanical aspects of related devices, unfavorable practical application and theoretical research, and insufficient structure of terahertz metamaterials. Device application, easy control of response frequency, strong absorption effect

Inactive Publication Date: 2015-09-02
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This layered metamaterial will significantly reduce the response rate of the device, and the dielectric loss is relatively scattered, which is not conducive to the absorption detection of the device.
In particular, this layered metamaterial uses a thicker multi-layer dielectric film. The thicker material structure will seriously affect the thermal, electrical, and mechanical properties of related devices, causing deformation and even failure of the device.
These deficiencies limit the application of existing metamaterial band-broadening techniques in devices, especially in uncooled THz microbolometers with suspended microbridge structures.
[0006] In short, the current terahertz metamaterial structure has shortcomings, which is not conducive to practical application and theoretical research.

Method used

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  • A performance control method of multilayer metamaterial unit structure
  • A performance control method of multilayer metamaterial unit structure
  • A performance control method of multilayer metamaterial unit structure

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Embodiment Construction

[0043] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0044] The multi-layer metamaterial structure composed of five layers of surface metal 5, upper dielectric 4, middle metal 3, lower dielectric 2, and bottom metal 1 provided by the present invention has special terahertz response performance. The present invention makes the embodiment of this multi-layer metamaterial structure as follows:

[0045] (1) Select a single crystal silicon wafer as the substrate of the metamaterial, after cleaning, dry it with high-purity nitrogen, and set it aside;

[0046] (2) On the surface of the substrate, use an electron beam evaporation system to deposit a continuous gold film with a thickness of 5-2000nm as the underlying metal 1 of the multilayer metamaterial;

[0047](3) Spin-coat a layer of polyimide film with a thickness of 50 nm to 40 μm on the surface of the above continuous gold film, as the lower medi...

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Abstract

The invention discloses a multi-layer metamaterial unit structure and a preparation and regulation method of the multi-layer metamaterial unit structure. The multi-layer metamaterial unit structure comprises surface layer metal, an upper layer medium, middle layer metal, a lower layer medium and bottom layer metal sequentially from top to bottom, wherein the surface layer metal and the middle layer metal are composed of metal rings of different sizes, an overlapped area and a non-overlapped area exist between the two layers of metal rings at the same time, and the bottom layer metal of the structure is a continuous metal film. The performance of the multi-layer metamaterial can be regulated through the traditional methods of changing resonance metal graphs, metal and medium material parameters and the like, more importantly, and the response frequency and the frequency band of the metamaterial relative to incident electromagnetic waves are regulated by changing the diameter of the surface layer metal ring and the middle layer metal ring, the width of the overlapped area of the two rings and the width of the non-overlapped area of the two rings and the like. Compared with a traditional metamaterial structure, the multi-layer metamaterial unit structure has the advantages of having a wider response frequency band, more centralized medium loss, thinner element materials and the like.

Description

technical field [0001] The invention relates to the technical field of metamaterials and terahertz detection, in particular to a terahertz multilayer metamaterial unit structure and a preparation and control method thereof. Background technique [0002] Due to the lack of effective terahertz (THz) source and detection technology, THz research has stagnated for a long time. In recent years, with the rapid development of physics, materials science, laser engineering and nanotechnology, terahertz technology has made great progress and has become a current international research hotspot. Terahertz detectors detect the shape or composition of objects by detecting changes in terahertz photons passing through the object. Compared with conventional detection technologies such as X-rays and nuclear magnetic resonance, terahertz detectors have the advantages of fast detection speed, high precision, strong penetration, and small radiation damage. Among them, uncooled terahertz detect...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P1/20H01Q17/00G02B1/00
Inventor 许向东黄锐蒋亚东姚洁敖天宏何琼马春前孙自强温粤江
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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