A polysilicon ingot casting furnace and its rapid ingot casting process
A polysilicon ingot casting furnace and ingot casting technology, which is applied in the directions of polycrystalline material growth, crystal growth, single crystal growth, etc., can solve problems such as short cycle times, improve ingot quality, uniform temperature distribution, and reduce dislocations Effect
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Embodiment 1
[0023] The lower part of the thermal insulation sleeve is evenly provided with 3 groups of side air vents equidistant along the circular direction. Each group is equidistantly provided with two side air vents along the circular direction, and the diameter of each side air vent is 30 mm.
[0024] 1. Put 650Kg of silicon material into the quartz crucible 5, evacuate to 0.1Pa, pass argon gas through the top air inlet 1 as a protective gas, and evaporate the moisture of the heat preservation sleeve 3 and silicon material, etc. Within 2 hours, the temperature inside the quartz crucible 5 was raised to 1175°C.
[0025] 2. Introduce argon gas as a protective gas to keep the pressure in the furnace body 2 at 400KPa, make the temperature in the quartz crucible 5 reach 1545°C within 4 hours and keep it warm for 8 hours until all the silicon materials are melted.
[0026] 3. During the crystal growth stage, the quartz crucible 5 containing the molten silicon liquid does not move, and th...
Embodiment 2
[0030] The lower part of the thermal insulation sleeve is evenly provided with 10 sets of side air vents equidistant along the circular direction. Each group is provided with 10 side air vents equidistantly along the circular direction, and the diameter of each side air vent is 50 mm.
[0031] 1. Put 650Kg of silicon material into the quartz crucible 5, evacuate to 0.08Pa, feed argon gas through the top air inlet 1 as a protective gas, and evaporate the moisture of the heat insulation layer 4, silicon material, etc. Within 2 hours, the temperature inside the quartz crucible 5 was raised to 1175°C.
[0032] 2. Introduce argon gas as a protective gas to keep the pressure in the furnace body 2 at 600KPa, make the temperature in the quartz crucible 5 reach 1545°C within 5 hours and keep it warm for 10 hours until the silicon material is completely melted.
[0033] 3. Keep the quartz crucible 5 filled with molten silicon liquid stationary, open the top air inlet 1 and the side ven...
Embodiment 3
[0037]The lower part of the thermal insulation sleeve is uniformly provided with 5 sets of side air vents equidistant along the circular direction. Each group is equidistantly provided with 5 side air vents along the circular direction, and the diameter of each side air vent is 40mm.
[0038] 1. Put 650Kg of silicon material into the quartz crucible 5, evacuate to 0.09Pa, feed argon gas through the top air inlet 1 as a protective gas, and evaporate the moisture of the heat insulation layer 4, silicon material, etc. Within 2 hours, the temperature inside the quartz crucible 5 was raised to 1175°C.
[0039] 2. Introduce argon gas as a protective gas to keep the pressure in the furnace body 2 at 500KPa, make the temperature in the quartz crucible 5 reach 1545°C within 5 hours and keep it warm for 9 hours until all the silicon materials are melted.
[0040] 3. Keep the quartz crucible 5 filled with molten silicon liquid stationary, open the top air inlet 1 and the side air inlet ...
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Abstract
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Application Information
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