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Method for preparing electronic grade high-purity hydrogen chloride from industrially synthesized hydrogen chloride

A hydrogen chloride and raw material technology, which is applied in the direction of chlorine/hydrogen chloride purification, chlorine/hydrogen chloride, etc., can solve problems such as not being able to meet market demand, and achieve the effect of meeting drying and adsorption requirements, high income, and high product purity

Active Publication Date: 2013-11-13
HANGZHOU ELECTROCHEM GROUP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are also domestic units that have successfully developed related electronic grade hydrogen chloride products, but they are still far from meeting market demand.

Method used

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  • Method for preparing electronic grade high-purity hydrogen chloride from industrially synthesized hydrogen chloride

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Experimental program
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Effect test

Embodiment 1

[0029] figure 1 It is a process flow diagram of the preparation method of the present invention. Such as figure 1 Shown, preparation method of the present invention comprises the following steps:

[0030] a. The raw material industrial hydrogen chloride is filtered to remove mechanical impurities and then compressed, at 0.4MP pressure and normal temperature to 1 M 3 The flow rate of / h enters from the bottom of the first-stage drying tower 1 equipped with 13X zeolite molecular sieve numbered DH05, and comes out from the top of the tower after removing most of the water through adsorption;

[0031] b. Then enter the bottom of the secondary drying tower equipped with 13X zeolite molecular sieve numbered DH06, go through deep dehydration, remove trace moisture and come out from the top of the tower. After removal, the moisture content in hydrogen chloride is less than 0.5ppm;

[0032] c. Then it enters from the bottom of the adsorption tower equipped with SSZ-13 zeolite mol...

Embodiment 2

[0042] The preparation method of the present invention comprises the following steps:

[0043] a. After the raw material industrial hydrogen chloride is filtered and compressed, under the pressure of 0.3MP and normal temperature, the 3 The flow rate of / h enters from the bottom of the first-stage drying tower 1 equipped with 13X zeolite molecular sieve numbered DH05, and comes out from the top of the tower after removing most of the water through adsorption;

[0044] b. Then enter the bottom of the secondary drying tower equipped with 13X zeolite molecular sieve numbered DH06, go through deep dehydration, remove trace moisture and come out from the top of the tower. After removal, the moisture content in hydrogen chloride is less than 0.5ppm;

[0045] c. Then it enters from the bottom of the adsorption tower equipped with SSZ-13 zeolite molecular sieve, absorbs and removes carbon dioxide and a very small amount of water, and then comes out from the top of the tower. The car...

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Abstract

The invention discloses a method for preparing electronic grade high-purity chlorine gas from industrial liquid chlorine. The method comprises the steps of: gasifying the industrial liquid chlorine, then performing multistage physical drying, adsorbing and removing carbon dioxide, performing compression-condensation, and rectifying for removing such gas with low boiling point as nitrogen gas, oxygen gas, hydrogen gas, carbon monoxide, methane and the like, thus obtaining the electronic grade high-purity chlorine gas with purity being over 99.999%. The method is low in cost and high in benefit, and products prepared by the method are high in purity and can be widely used for preparation of optical-fiber-communication, microelectronic and high-temperature superconducting materials.

Description

technical field [0001] The invention relates to a method for preparing electronic-grade high-purity hydrogen chloride, in particular to a method for purifying and preparing electronic-grade high-purity hydrogen chloride by using industrially synthesized hydrogen chloride as a raw material. Background technique [0002] Electronic-grade high-purity hydrogen chloride is an important material for silicon wafer etching, passivation, epitaxy, vapor phase polishing, gettering and cleaning treatment in the production of integrated circuits. It can also be used in metal smelting, optical communication and scientific research. With the development of large-scale integrated circuits, the requirements for the purity of hydrogen chloride are getting higher and higher. In addition to having a purity of more than 99.999%, the requirements for the content of impurities are becoming more and more stringent, especially strict restrictions on hydrocarbons and carbon oxides. content to prevent...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/07
Inventor 卢孔燎郑琪章意坚
Owner HANGZHOU ELECTROCHEM GROUP
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