Optical heterodyne interference method for removing non-linear error based on capacitance charging timing method
A nonlinear error, optical heterodyne interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of poor real-time performance, large amount of calculation, complex system, etc.
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[0053] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0054] The system implementing the present invention based on capacitive charging phase detection, phase-locked loop filtering and optical heterodyne interferometry to eliminate nonlinear errors by weighted superposition in 3-dimensional linear space can be divided into optical part and electronic signal processing part. The principle of the optical part is as follows figure 1 As shown, on the basis of an original optical part, the present invention adds the part in the dotted line box in the figure. First, the working principle of the optical part of the original heterodyne interferometry system is described: the laser light is emitted by the laser 101, and enters the acousto-optic device 103 through the first part of the mirror 102, and is frequency-shifted and then emitted to the second part of the mirror 114, and the transmitted light It is reflected bac...
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