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Absolute detection method for surface shape error of spherical surface

A surface error and absolute detection technology, which is applied to measuring devices, instruments, optical devices, etc., can solve the problem that the surface error of the reference surface cannot be accurately separated, etc.

Active Publication Date: 2013-09-11
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In order to solve the problem that the measured spherical surface shape error and the reference surface shape error cannot be accurately separated during the high-precision surface shape detection process, the invention proposes an absolute detection method for the spherical surface shape error

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  • Absolute detection method for surface shape error of spherical surface
  • Absolute detection method for surface shape error of spherical surface
  • Absolute detection method for surface shape error of spherical surface

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Embodiment Construction

[0046] The present invention will be described below in conjunction with the accompanying drawings and specific embodiments.

[0047] Such as figure 1 It shows the horizontal detection device when the spherical surface to be tested is a concave mirror in the present invention, which includes: a standard mirror 1, a reference surface 2, a spherical surface to be tested 3, a mirror to be tested 4, a mirror to be tested 5 after concentric translation, standard The focal point of the mirror 1 coincides with the center of curvature of the measured spherical surface 3, and the two are in a concentric position. After rotating the measured spherical surface 3 around the optical axis of the system, its concentric position relationship with the standard mirror 1 remains unchanged, and the measured spherical surface 3 When doing concentric translation along a certain direction, the concentric position relationship between the measured spherical surface 3 and the standard mirror 1 also re...

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Abstract

The invention discloses an absolute detection method for a surface shape error of a spherical surface. The absolute detection method comprises the steps of: establishing an equation system about Zernike multinomial coefficients of a measured spherical surface and a reference surface by utilizing measurement data of multiple rotation and concentric translation of the measured spherical surface at a con-focal position and adopting a Zernike multinomial fitting based rotation translation algorithm; and obtaining the Zernike multinomial coefficient by applying a least square method so as to obtain absolute surface shape information of the measured spherical surface and the reference surface. The absolute detection method is also available for the detection of the surface shape error of a plane. As a global optimized idea is adopted to resolve multinomial coefficients of the measured spherical surface and the reference surface at the same time, the absolute detection method for the surface shape error of the spherical surface can suppress system error and random noise for the better, and achieves stronger interference resistance and important application values.

Description

technical field [0001] The invention relates to an absolute detection method for surface shape errors, which belongs to the field of advanced optical detection, in particular to the field of high-precision absolute detection of optical mirror surfaces. Background technique [0002] With the development of modern optical technology, the requirements for surface shape detection accuracy of optical components are getting higher and higher. High-precision surface interference detection has always been a hot and difficult issue in the field of optical inspection and testing. As an important element in the optical system, the detection accuracy of the spherical surface is limited by the surface quality of the reference surface, and the absolute detection technology can effectively separate the surface information of the reference surface and the measured surface. [0003] At present, the commonly used absolute detection method is the double spherical method (K.E.Elssner, R.Burow,...

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Application Information

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IPC IPC(8): G01B11/24
Inventor 宋伟红侯溪李世芳赵文川吴高峰徐燕毛洁吴永前万勇建
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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