Wafer carrying device and method for wafer rewinding

Abstract

The invention discloses a wafer bearing device and a method for overturning wafers. Due to the facts that a trolley lifting module and a location hole identification module in the wafer bearing device are of a movably detachable structure, a clamping groove formed in the upper surface of a loading box body and a clamping groove formed in the lower surface of the loading box body are the same, and a clamping joint of the trolley lifting module and a clamping joint of the location hole identification module are also the same, the trolley lifting module and the location hole identification module can be conveniently exchanged. In addition, due to the fact that a plurality of sets of elastic bearing clamping grooves which can fix the wafers are formed in a cover plate of a loading box, the wafers can be prevented from sliding when the wafer bearing device is turned over. Therefore, on one hand, the time for overturning the wafers can be saved, the technology process can be effectively shortened, expenditure for purchasing a wafer overturning device is saved, production cost of devices is reduced, and on the other hand, technological waiting time of products can be shortened, and the yield of the products is improved.

Description

technical field [0001] The invention relates to a turnover tool, in particular to a wafer carrying device and a wafer rewinding method. Background technique [0002] Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. It can be processed into various circuit element structures on silicon wafers, which are called IC products with specific electrical functions. Single crystal silicon wafers are drawn and refined from ordinary silica sand, and are made into single crystal silicon rods through a series of measures of dissolution, purification and distillation. After the single crystal silicon rods are polished and sliced, they become wafers. In wafer production, it is often necessary to use turnover tools to transfer materials to the next process, and most manufacturers use carrier boxes for wafer turnover. [0003] The rapid development of integrated circuits has led to inc...

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Problems solved by technology

[0008] In view of the above existing problems, the present invention provides a wafer carrying device and a wafer rewinding method to overcome the need to use rewinding equipment for rewinding in the prior art due to process requirements on the back of the wafer. Prolonging the process, prolonging the process time, and spending a huge amount of money to purchase special rewinding equipment, which leads to the problem of increasing the manufacturing cost of the device, thereby improving production efficiency, eliminating the use of rewinding equipment, and reducing the production cost of the device

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