Dynamic matching device of ultrasonic power supply and method thereof
A technology of dynamic matching and power supply, applied in the direction of fluid using vibration, etc., can solve the problems of poor reliability of phase detection circuit, poor load carrying capacity, complex sampling circuit, etc., and achieve easy market promotion, low cost, and simple circuit structure Effect
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[0031] The present invention will be further described below in conjunction with the accompanying drawings.
[0032] Such as figure 1 As shown, the dynamic matching device of the ultrasonic power supply of the present invention includes ultrasonic signal generators, drive isolation circuits, ultrasonic power amplifiers, matching transformers, tuning inductors and ultrasonic transducers connected in series in sequence, and the ultrasonic transducers are installed at the bottom of the reaction vessel , also includes a voltage and current sampling circuit for collecting the real-time working voltage and working current at both ends of the ultrasonic transducer circuit including the tuning inductance, and the voltage and current sampling circuit sequentially passes through the rear stage isolation circuit, filter shaping circuit, programmable logic device The phase measurement unit is provided in the programmable logic device, and the PWM excitation pulse output terminal of the pr...
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