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Micromachined 3-axis accelerometer with a single proof-mass

A three-axis acceleration, single-mass technology, applied in the measurement of acceleration, multi-dimensional acceleration measurement, speed/acceleration/shock measurement, etc., can solve the problem of increasing the size and cost of the three-axis acceleration sensor

Active Publication Date: 2013-08-07
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Incorporating multiple sensors or multiple masses on the die increases the size and cost of the integrated triaxial accelerometer

Method used

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  • Micromachined 3-axis accelerometer with a single proof-mass
  • Micromachined 3-axis accelerometer with a single proof-mass
  • Micromachined 3-axis accelerometer with a single proof-mass

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Embodiment Construction

[0026] Among other things, the present inventors have recognized a micromechanical monolithic three-axis gyroscope configured to utilize a single centrally anchored mass to detect angular velocity about all three axes, simultaneously for each The response modes of each axis are effectively decoupled to minimize cross-axis sensitivity.

[0027] In one example, the unique mass partitioning and flexure configuration disclosed in this application can allow for three-axis angular velocity detection using a single drive mode oscillation (requiring only one drive control loop for all axes). Therefore, the complexity and cost of the control electronics of the three-axis gyroscope disclosed in this application can be greatly reduced compared to existing multi-axis gyroscopes that use three separate drive loops.

[0028] Furthermore, the present inventors have recognized, among other things, a micromechanical three-axis accelerometer configured to utilize a single centrally anchored mas...

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Abstract

This document discusses, among other things, an inertial measurement system including a device layer including a single proof-mass 3-axis accelerometer, a cap wafer bonded to a first surface of the device layer, and a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3-axis accelerometer. The single proof-mass 3-axis accelerometer can be suspended about a single, central anchor, and can include separate x, y, and z-axis flexure bearings, wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor and the z-axis flexure is not symmetrical about the single, central anchor.

Description

[0001] claim priority [0002] This application claims U.S. Provisional Patent Application No. 61 / 384,245, entitled "MICROMACHINED MONOLITHIC 3-AXIS GYROSCOPE WITH SINGLE DRIVE," filed September 18, 2010 by Acar (Agency Docket No. 2921.100PRV) and Acar's filing on September 18, 2010 entitled "MICROMACHINED 3-AXIS ACCELEROMETER WITH A SINGLE PROOF-MASS ” of U.S. Provisional Patent Application No. 61 / 384,246 (Attorney Docket No. 2921.101PRV), each of which is hereby incorporated by reference in its entirety. [0003] In addition, this application is related to U.S. Patent Application No. 12 / 849,742, filed August 3, 2010 by Acar et al., entitled "MICROMACHINED INERTIAL SENSOR DEVICES" and by Marx et al., August 2010. Related to US Patent Application No. 12 / 849,787, entitled "MICROMACHINED DEVICES AND FABRICATING THE SAME" filed on the 3rd, the entire contents of each patent application document are hereby incorporated by reference. technical field [0004] The present invention...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/18G01P15/14G01C19/5755
CPCH01L29/84G01P15/125G01P15/18G01P2015/0848G01C19/5755B81B7/04B81B2201/0235B81B2201/0242B81B2203/051B81B2203/053B81B2203/055B81B2203/056B81B2203/058B81B2207/094
Inventor C·阿卡
Owner QST CORP
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