Pressure sensor micro-nano structure with high stability under high-temperature environment

Abstract

The invention provides a pressure sensor micro-nano structure with the high stability under a high-temperature environment. The pressure sensor micro-nano structure comprises a silicon carbide membrane sheet, a reflection membrane, a semi-reflection membrane, a bonding layer, a silicon carbide substrate, a packaging layer and a sapphire optical fiber, wherein the reflection membrane is plated in the middle of the silicon carbide membrane sheet; the semi-reflection membrane is plated at the tail end of the sapphire optical fiber; the bonding layer is located between the silicon carbide membrane sheet and the silicon carbide substrate; and the sapphire optical fiber is connected with the silicon carbide substrate through the packaging layer, and is used for transmitting an optical signal. The detection device disclosed by the invention is simple in structure and strong in anti-interference performance, and pressure detection under the high-temperature environment can be realized.

Description

technical field [0001] The invention relates to a pressure sensor micro-nano structure with high stability in a high-temperature environment, belonging to the technical field of aviation pressure sensor manufacturing. Background technique [0002] Aeroengine technology is known as the "Pearl in the Crown" of modern industry and an important symbol of a country's technological, industrial, economic and national defense strength. An aeroengine is a power device with complex aerodynamics, heat and structure, and its performance affects the performance of the aircraft. With the development of aero-engines towards high boost ratio, high turbine inlet temperature, high thrust-to-weight ratio, and high reliability, under complex and changeable conditions, measure the dynamic pressure and flow field characteristics of the high-temperature region of the engine during the transient process and master Its changing law is extremely important for realizing engine control and regulation....

AI Technical Summary

Problems solved by technology

At present, the silicon diffused piezoresistive pressure sensor is mainly used commercially. Its technology is mature and its performance is excellent, but it is limited by the temperature resistance of the P-N junction, and it can only measure pressure below 120°C. It will seriously deteriorate and even fail, and plastic deformation and current leakage will occur at 600°C, resulting in extreme imbalance of the signal processing system and circuit, which is far from meeting the pressure detection in the ultra-high temperature environment of future aero-engines

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