Defect checking load counting system and method

Abstract

The invention discloses a defect checking load counting system and method. The method comprises the following steps of: detecting defect signals by defect detection cabinets; directly leading a wafer file out of a fixed catalog of a server through a defect detection system; performing further checking on overproof wafers with massive defects by using the defect detection cabinets; after all the defects are primarily checked by the defect detection cabinets, automatically generating KLA files and picture files which have the same name, and transmitting the files to the defect detection system; backing up the corresponding files to the corresponding cabinets when the defect detection system correctly introduces data; connecting to the corresponding cabinets to obtain all file lists corresponding to the defect checking cabinets; resolving all pieces of information containing checking and counting information according to the file lists; and checking a database corresponding to the defect detection system to obtain a corresponding counting result. By the system and the method, the problem that the conventional defect detection system can not conveniently and accurately count loads of the defect checking cabinets.

Description

technical field [0001] The present invention relates to a defect inspection load statistics system and method, in particular to a defect inspection load statistics system and method based on the Klarity Defect system. Background technique [0002] The Klarity Defect system is a defect inspection system widely used in semiconductor manufacturing and production. After the defect detection machine detects the defect signal, the wafer with the number of defects exceeding the standard needs to be further inspected on the defect inspection machine to obtain specific photos of the defects and classify them. The usual practice is that the online engineer will directly export the wafer file to the fixed directory of the server through the Klarity Defect system after the defect signal is detected by the defect inspection machine, and then the online engineer will operate the defect inspection machine for further inspection. After further inspection, the inspection machine will automa...

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Problems solved by technology

[0004] In order to overcome the deficiencies in the prior art above, the purpose of the present invention is to provide a defect inspection load statistics system and method, which can solve the problem that the current Klarity Defect system cannot conveniently and accurately count the load of defect inspection machines. In addition, While counting the load of the machine, the invention also solves the statistics and inspection of the daily workload of the online assistant engineer, which is convenient for the relevant person in charge to reasonably arrange the workload and staffing

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