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Three-dimensional MEMS (Micro-electromechanical Systems) accelerometer measurement part for petroleum well logging and preparation method thereof

A technology of accelerometer and oil well logging, which is applied in wellbore/well parts, technology for producing decorative surface effects, measurement, etc. It can solve problems such as unusable, large space, poor vibration measurement effect, etc., and achieve improvement The effect of precision

Inactive Publication Date: 2013-07-03
CHINA NAT ACAD NANOTECH & ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0015] For capacitive accelerometers, not only does it require a larger space than MEMS, but it also has poor vibration measurement effects from the measurement direction and is not suitable for downhole operations.
In terms of the measurement sensitivity and anti-interference ability of the accelerometer, the tunnel accelerometer is undoubtedly the best, but in the process of logging while drilling, the situation of the downhole formation is unknown, and various situations often occur, which is very easy to damage Probes, and logging while drilling has very high requirements on the life and range of various instruments, so tunnel accelerometers cannot be used in logging

Method used

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  • Three-dimensional MEMS (Micro-electromechanical Systems) accelerometer measurement part for petroleum well logging and preparation method thereof
  • Three-dimensional MEMS (Micro-electromechanical Systems) accelerometer measurement part for petroleum well logging and preparation method thereof
  • Three-dimensional MEMS (Micro-electromechanical Systems) accelerometer measurement part for petroleum well logging and preparation method thereof

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Embodiment

[0042] A measuring component of a three-dimensional MEMS accelerometer for oil well logging is characterized in that it includes a cube silicon base 8 with accelerometers on its six surfaces, the cube silicon base has a heat-insulating material encapsulation shell 6, and passes through Wire 7 is connected to an external circuit.

[0043] The above-mentioned accelerometer includes n×n measuring units 5 connected in parallel.

[0044] The measurement range of the above-mentioned accelerometer is between 0.05g and 50g (g is the acceleration of gravity).

[0045] A method for preparing a measuring component of a three-dimensional MEMS accelerometer for petroleum logging, characterized in that it comprises the following steps:

[0046] (1) Use MEMS simulation to design the graph of the n×n measuring unit, and make a nickel Ni metal mask with glass as the substrate;

[0047] (2) Use a photolithography machine to transfer the pattern to the silicon substrate 1 spin-coated with phot...

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Abstract

The invention provides a three-dimensional MEMS (Micro-electromechanical Systems) accelerometer measurement part for petroleum well logging and a preparation method thereof. The three-dimensional MEMS accelerometer measurement part comprises six cube silicon substrates of which the surfaces are all provided with accelerometers; the cube silicon substrates are packaged by insulating materials and are connected with an external circuit by wires; and each accelerometer comprises n*n measurement units which are connected in parallel. A piezoresistive accelerometer on the basis of an MEMS technology can measure three-dimensional dynamic acceleration of a drill bit in the well logging process during drilling, can be adapted to the harsh underground working environment, has a small size and has higher accuracy.

Description

technical field [0001] The invention belongs to the field of design and application of MEMS systems, in particular to a measuring part of a three-dimensional MEMS accelerometer used for oil well logging and a preparation method thereof. Background technique [0002] In the exploration and development stage of oil and gas fields, one of the important tasks of on-site geological work is to implement the geological structure to divide the drilling geological section. By determining the sequence, burial depth, stratum thickness and rock properties of strata of various geological ages drilled through, we can understand the structural position, lithological characteristics and oil and gas situation of oil and gas source, reservoir and caprock. To complete these tasks, in addition to geological methods such as drilling coring, well wall coring, and cuttings logging, the logging method is used to study various geophysical properties of rock formations and indirectly determine the ge...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): E21B47/00B81C1/00
Inventor 高玉翔牟诗城
Owner CHINA NAT ACAD NANOTECH & ENG
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