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Polycrystalline silicon alkaline texturing method

A polysilicon and alkaline technology, applied in the field of solar cells, can solve the problems of cell efficiency and appearance defects, inability to match the anti-reflection film process, and inability to obtain a good suede surface, etc., to achieve high production costs, reduce reflectivity, and avoid chromatic aberration Effect

Inactive Publication Date: 2015-07-01
INNER MONGOLIA RIYUE SOLAR ENERGY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, conventional polysilicon surface textures are all etched with acid. Since corrosion is an exothermic process, forced cooling and refrigeration must be used, and the time control must also be strict. Otherwise, a good texture cannot be obtained, and it cannot be combined with the subsequent deposition of silicon nitride anti-reflection coating process. Matching, the color difference of the anti-reflection coating deposited on the battery is large, which eventually leads to shortcomings in the efficiency and appearance of the battery

Method used

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Embodiment 1

[0018] Prepare NaNO 2 , NaOH and deionized water mass ratio of 8:1:50 alkaline corrosion solution. Put the chemically purified polysilicon wafer (area 156mm×156mm) into the above-mentioned etching solution at 75°C. After 30 seconds of texturing, the silicon wafer was taken out and rinsed with deionized water for 2 minutes. Then put the silicon wafer into the acidic solution with a volume ratio of HCl, HF and deionized water of 1:3:8, and rinse for 120 seconds. Then rinse with deionized water for 2 minutes and dry. like figure 2 The scanning electron microscope (SEM) photo of the surface of the silicon wafer after the texturing treatment provided by the present invention shows that the textured surface is composed of irregular corrosion pits composed of flat surfaces similar to cut surfaces, which are uneven and have an obvious textured feeling.

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Abstract

The invention provides a polycrystalline silicon alkaline texturing method, which comprises the steps of preparing alkaline corrosion solution, wherein the mass ratio of NaNO2 to NaOH and deionized water is 8:1:50 to 10:1:50; putting a polycrystalline silicon wafer into the alkaline corrosion solution for texturing, wherein the temperature of the alkaline corrosion solution is 70-80DEG C and the texturing time is 25-45 seconds; rinsing the polycrystalline silicon wafer with deionized water, wherein the rinsing time is approximate 2 minutes; rinsing the polycrystalline silicon wafer with acidic solution, wherein the volume ratio of HCl to HF and deionized water in the acidic solution is 1:3:8 and the rinsing time is 120-150 seconds; rinsing the polycrystalline silicon wafer in deionized water again, wherein the rinsing time is approximate 2 minutes; and drying the polycrystalline silicon wafer. By using the polycrystalline silicon alkaline texturing method provided by the invention, the production investment can be reduced, the production cycle of solar cells can be shortened, the energy consumed for production can be reduced, the uniformity of the obtained textured surface is good and the surface reflectivity of the solar cells can be reduced.

Description

technical field [0001] The invention relates to the field of solar cells, in particular to an alkaline texturing method for polycrystalline silicon used in solar cells. Background technique [0002] On a global scale, photovoltaic power generation technology has also become a hot spot in applied research in various countries. Any breakthrough in this field will have a revolutionary impact on the future energy utilization of mankind. At present, the photovoltaic industry mainly refers to the crystalline silicon solar cell industry, which accounts for about 90% of the market share, and the efficiency of large-scale commercial solar cells can reach 18%-19%. Crystalline silicon has the advantages of high conversion efficiency, stable performance, and high degree of commercialization, but there are also problems such as shortage of silicon materials and high manufacturing costs. Even so, the development of photovoltaic technology is still dominated by crystalline silicon solar c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18C30B33/10
CPCY02P70/50
Inventor 李云谢俊叶马承鸿倪明镜李健
Owner INNER MONGOLIA RIYUE SOLAR ENERGY TECH
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