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Etching method of blazing concave surface holographic grating subarea reaction ion beams

A concave grating and holographic grating technology, applied in the field of spectroscopy, can solve the problems of different blaze angles and affect the diffraction efficiency of blazed concave gratings, and achieve the effects of improving diffraction efficiency, high blaze angle consistency, and easy implementation

Inactive Publication Date: 2013-05-15
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In order to solve the problem of different blaze angles obtained by etching concave gratings by using the existing method, and at the same time, the difference in blaze angles affects the diffraction efficiency of the blazed concave gratings, and provides a method for etching blazed concave holographic gratings with partitioned reactive ion beams

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  • Etching method of blazing concave surface holographic grating subarea reaction ion beams
  • Etching method of blazing concave surface holographic grating subarea reaction ion beams
  • Etching method of blazing concave surface holographic grating subarea reaction ion beams

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specific Embodiment approach 1

[0017] Specific implementation mode 1. Combination figure 1 and figure 2 Describe this embodiment, the blazed concave holographic grating partitioned reactive ion beam etching method, the method is realized by the following steps:

[0018] Step 1, placing the concave grating mask substrate 3; place the concave grating mask substrate 3 with a sinusoidal or rectangular groove shape on a rotary table, the center of rotation of the table is O, and the coordinate system is XYZ , can make a rotary motion around the Y axis, the center of the ball is on the rotary axis Y of the rotary table, that is, the coordinate origin O in the figure; the plane where the grating line 2 at the apex A of the concave grating mask substrate 3 passes through the rotary axis Y, The planes where the rest of the engraved lines are located are parallel to the axis of rotation Y.

[0019] Step 2, select the ion beam incident angle; figure 2 As shown, if the spherical radius of the concave grating mask ...

specific Embodiment approach 2

[0025] Specific embodiment two, combine Figure 1 to Figure 5 This implementation mode is described. This implementation mode is an example of the blazed concave holographic grating partitioned reactive ion beam etching method described in the first specific implementation mode: the specific process is as follows:

[0026] Step 1. Placement of the concave grating mask substrate 3; place the concave grating mask substrate 3 with a rectangular groove shape on a rotary table, the center of rotation of the table is O, and the coordinate system is XYZ, which can be rotated around The Y axis makes a rotary motion, and the center of the ball is on the rotary axis Y of the rotary table, that is, the coordinate origin O in the figure; the plane where the grating line 2 at the vertex A of the concave grating mask passes through the rotary axis Y, and the planes where the other lines are located are parallel to The axis of rotation Y, where the groove shape of the concave holographic gra...

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Abstract

The invention discloses an etching method of blazing concave surface holographic grating subarea reaction ion beams, and relates to the spectrum technical field. The problems that blazing angles which are obtained by etching concave surface gratings by using an existing method are different, and meanwhile, the diffraction efficiency of the blazing concave surface gratings is affected by the difference of the blazing angles are solved. The etching method includes the steps of placing a concave surface grating mask substrate; selecting an ion beam incident angle; dividing a concave surface grating substrate; manufacturing etching narrow slits; placing the narrow slits; and etching the concave surface gratings. According to the etching method of the blazing concave surface holographic grating subarea reaction ion beams, subarea reaction ion beam etching is conducted on the concave surface grating mask substrate with the groove shape being of a sine shape or a rectangle-like shape, so that the consistency of the blazing angles of blazing concave surface holographic gratings after etching is high, and therefore the etching method of the blazing concave surface holographic grating subarea reaction ion beams has direct and great significance to manufacturing the blazing concave surface holographic gratings with the high diffraction efficiency.

Description

technical field [0001] The invention relates to the field of spectrum technology, in particular to a partitioned reactive ion beam etching method for a blazed concave holographic grating. Background technique [0002] Concave grating not only has dispersion function, but also has focusing function because of its concave surface shape, so it is applied in the field of spectral analysis instruments. Compared with planar gratings, it can omit the focusing mirror, reduce the optical-mechanical structure, and facilitate the miniaturization of the instrument. As an important technical index, the diffraction efficiency of the concave grating directly affects the resolution and signal-to-noise ratio of the spectral analysis instrument. Therefore, the concave grating capable of achieving high diffraction efficiency, such as the blazed concave holographic grating, is the goal pursued by the spectral analysis instrument industry. [0003] At present, when parallel ion beam etching equi...

Claims

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Application Information

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IPC IPC(8): G02B5/18G03F7/00
Inventor 谭鑫吴娜巴音贺希格齐向东李文昊孔鹏
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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