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Virtual force feedback remote nano operation platform based on scanning electron microscope and method for realizing virtual force sensing interacting

An electron microscope and operating platform technology, applied in the field of remote nano-operation, can solve the problems of lack of image information, poor flexibility, and low operating efficiency of nanoparticles or components, and achieve the effects of ensuring safety, improving success rate, and enhancing perception ability

Active Publication Date: 2013-05-08
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a scanning electron microscope-based virtual operating system for the lack of real-time image information of the operation process, low operating efficiency and poor flexibility of the operating system for nano-particles or components commonly used at home and abroad. Force feedback telesensing operation platform and method for realizing virtual force sense interaction

Method used

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  • Virtual force feedback remote nano operation platform based on scanning electron microscope and method for realizing virtual force sensing interacting
  • Virtual force feedback remote nano operation platform based on scanning electron microscope and method for realizing virtual force sensing interacting

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specific Embodiment approach 1

[0042] Specific implementation mode one: the following combination figure 1 Describe this embodiment, a scanning electron microscope-based virtual force feedback remote operation platform described in this embodiment, which includes a scanning electron microscope 1, a nanopositioner 2, an operation probe 3, a sample stage 4, and a tactile master hand Omega.35, nanopositioning controller 6, host computer 7 and sample cavity 8,

[0043] The sample cavity 8 is provided with a nanopositioner 2, and the nanopositioner 2 is located at the bottom of the sample cavity 8;

[0044] The nanopositioner 2 is provided with an operation probe 3, and the end of the operation probe 3 is in contact with the table top of the sample table 4; the sample table 4 is fixedly installed on the inner side wall of the sample cavity 8; the sample table 4 for placing nanowires;

[0045] The scanning electron microscope 1 is fixedly installed in the center above the sample cavity 8, the lens of the scanni...

specific Embodiment approach 2

[0052] Specific implementation mode two: the following combination figure 1 This embodiment will be described. This embodiment is a further description of Embodiment 1. The nanopositioner 2 described in this embodiment is realized by using an Attocube.

specific Embodiment approach 3

[0053] Specific implementation mode three: the following combination figure 1 This embodiment is described. This embodiment is a further description of Embodiment 1. The nanopositioning controller 6 described in this embodiment is realized by using the ANC150.

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Abstract

The invention relates to a virtual force feedback remote nano operation platform based on a scanning electron microscope and a method for realizing virtual force sensing interacting. The problems that currently, operation process real-time image information is lacked when a nanometer operation system commonly used in China and abroad is used to operate nanometer particles or components, and the system is low in operation efficiency and bad in flexibility are solved. The platform comprises the scanning electron microscope, a nanometer locator, an operation probe, a sample table, a touch main hand Omega.3, a nanometer locating controller, an upper computer and a sample cavity. In the environment of VC ++ 2008, a virtual three-dimensional nanometer operation environment is developed, collision detection is carried out through a collision detection algorithm, the upper computer carries out force sense rendering on acquired feedback force which is fed back to the touch main hand Omega.3, and virtual force sensing interacting is achieved. The virtual force feedback remote nano operation platform based on the scanning electron microscope and the method for realizing virtual force sensing interacting are suitable for the technical field remote nano operation.

Description

technical field [0001] The invention relates to a microscope-based virtual force feedback remote-sensing operation platform and method, belonging to the technical field of remote-sensing operation. Background technique [0002] In recent decades, with the rapid development of micro / nano technology and the continuous demand for structure miniaturization and functional integration of micro system products, efficient, sensitive and adaptable nano operating systems have broad application prospects. However, due to the influence of factors such as the size effect of the nanoscale, the traditional operation method is difficult to adapt to the development needs of the nanoscale component operation technology, and the remote operation with virtual reality function is gradually on the stage. [0003] At present, the operating system based on the atomic force microscope (AFM) is the most mature research on nano-manipulation at home and abroad, but due to the lack of real-time image in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F3/01
Inventor 荣伟彬李东洁邹宇肖万哲孙立宁
Owner HARBIN INST OF TECH
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