Full-closed cascading micro mechanical filter of micro shielding structure

Abstract

The invention relates to a full-closed cascading micro mechanical filter of a micro shielding structure, and the filter structurally comprises an upper layered substrate and a lower layered substrate, wherein the upper layered substrate and the lower layered substrate are integrated through a micro mechanical alignment bonding process. A microwave signal is transmitted to the transmission wire of an input signal interface of the lower layered substrate from the input end of the filter of the upper layered substrate; the signal output end of the lower layered substrate is connected to the output end of the filter of the upper layered substrate through an output through hole; the lower surface of the lower layered substrate of the filter is a lower layered grounding surface; parts on the upper surface of the upper layered substrate other than graphics on the input end and the output end of the filter form an upper layered grounding surface; and the upper layered grounding surface and the lower layered grounding surface are electrically connected through a metal through hole array. The full-closed cascading micro mechanical filter of the micro shielding structure has the advantages that an upper wafer and a lower wafer are connected by the signal through a three-dimensional through hole, the sizes of the upper layered substrate and the lower layered substrate are the same, so that the physical sizes of input and output interfaces are reduced; a full-closed structure is adopted, so that microwave leakage is reduced; and pollution of water flow, chips and the like in chip separation and other post processes to the internal structure of a chip is avoided.

Description

technical field [0001] The invention relates to a filter in the microwave working frequency band, in particular to a fully-sealed laminated micro-mechanical filter with a micro-shielding structure, and belongs to the cross-technical field of microwave circuits, microelectronics and micromechanical (MEMS) systems. Background technique [0002] Microwave filters are widely used in satellite, communication, aviation, aerospace and other electronic systems to select and transmit passband signals and filter out stopband signals. With the development of modern technology, such electronic systems are required to be small in size, high in reliability and low in cost. However, general filters are difficult to adapt to the miniaturization, integration and lightweight requirements of modern communication systems due to their own limitations: traditional cavity filters are large in size, and they cannot be monolithically integrated with signal processing circuits, which limits The mini...

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