Method and device for directionally solidifying and purifying polysilicon by vacuum extraction of tailing
A technology of directional solidification and polysilicon, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve the problems of high cost of cutting equipment, influence on purification effect, unfavorable production cost, etc., achieve convenient equipment transformation and installation, and reduce process links , The effect of saving production cycle and cost
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Embodiment 1
[0024] like figure 1 The equipment used in the method for directional solidification and purification of polysilicon by vacuum extraction of tailings is shown. The outer wall is composed of a vacuum chamber 2, and a vacuum pipeline 15 is installed on the outer wall. One end of the vacuum pipeline is connected to a vacuum pump group 14.
[0025] A ventilation pipeline 16 is fixedly installed on the outer wall, and a tailings collection box 13 is installed movably. The water cooling plate 12 is movably installed at the bottom of the vacuum chamber, and the graphite plate 11 is placed on the top of the water cooling plate. One end is nested and connected with the graphite plate through a hole, and the other end is nested and connected with the graphite tray 9. The crucible is placed on the graphite tray, the graphite heating element 6 is set on the periphery of the crucible 7 and fixed on the side wall of the vacuum chamber, and the carbon felt insulation barrel 4 sets are instal...
Embodiment 2
[0032] Use the equipment described in Example 1 to take the tailings and carry out directional solidification to purify polycrystalline silicon. First, add silicon material with a purity of 99.5% to the crucible 7, which is 90% of the volume of the crucible, close the ventilation line 16, and turn on the vacuum pump group 14. The vacuum degree in the vacuum chamber 2 is pumped to 10Pa, then close the vacuum pump group, open the ventilation pipeline 16, fill the vacuum chamber 2 with 99.91% argon until the pressure reaches 100Pa, and close the ventilation pipeline 13;
[0033]The second step of smelting and solidification: turn on the power, use the induction coil and graphite heating element to heat the silicon material in the crucible to 1450°C until it is completely melted into a silicon melt, and keep it at this temperature for 30 minutes, then pull the water cooling plate vertically downward, Make the silicon melt in the crucible move vertically downward at a constant speed...
Embodiment 3
[0036] Use the equipment described in Example 1 to take the tailings and carry out directional solidification to purify polysilicon. First, add silicon material with a purity of 99.6% of the volume of the crucible to the crucible 7, close the ventilation line 16, and turn on the vacuum pump group 14. The vacuum in the vacuum chamber 2 is pumped to 1Pa, then the vacuum pump group is closed, the ventilation pipeline 16 is opened, and 99.95% argon gas is filled into the vacuum chamber 2 until the pressure reaches 1000Pa, and the ventilation pipeline 13 is closed;
[0037] The second step of smelting and solidification: turn on the power, use the induction coil and graphite heating element to heat the silicon material in the crucible to 1550 ° C until it is completely melted into a silicon melt, and keep it at this temperature for 40 minutes, pull the water cooling plate vertically downward, Make the silicon melt in the crucible move vertically downward at a constant speed of 0.9 m...
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