Self-measurement piezoelectric stack pump

A piezoelectric stacking and self-measurement technology, which is applied in the direction of pumps, pumps with flexible working elements, liquid variable capacity machinery, etc., can solve the problems of accuracy and reliability of measurement accuracy, and achieve accurate measurement accuracy The effect of high accuracy and reliability and simple structure

Inactive Publication Date: 2013-03-20
ZHEJIANG NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the deficiencies in the accuracy and reliability of the measurement accuracy of the existing self-measuring piezoelectric pumps, the present invention proposes a piezoelectric pump that realizes output flow and pressure measurement based on valve opening detection, referred to as a self-measuring piezoelectric pump. stack pump

Method used

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  • Self-measurement piezoelectric stack pump

Examples

Experimental program
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Embodiment Construction

[0018] The valve cover 2 is installed on the pump cover 4 through screws, and the pump cover 4 is installed on the pump body 10 through screws; a cantilever beam type outlet valve 1 and an inlet valve are bonded between the valve cover 2 and the pump cover 4 3. The outlet valve 1 is formed by bonding the piezoelectric film 1-1 and the substrate 1-2, and the inlet valve 3 is formed by bonding the piezoelectric film 3-1 and the substrate 3-2; in the pump cover 4 A pump chamber diaphragm 8 is crimped between the pump body 10, and a piston 7 and a top block 9 are installed on both sides of the pump chamber diaphragm 8 through screws; the piston 7 and the sealing ring 6 installed on the piston 7 , the pump cover 4, the outlet valve 1 and the inlet valve 3 together constitute the pump chamber 5; the bolt 13 installed at the end of the pump body 10 presses the piezoelectric stack driver 11 on the top block 9 through the anti-twist block 12 ; The piezoelectric stack driver 11, the out...

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Abstract

The invention relates to a self-measurement piezoelectric stack pump, belonging to the field of micro fluid transmission and control. A valve cover is installed on a pump cover, and the pump cover is installed on a pump body. A cantilever beam type outlet valve and a cantilever beam type inlet valve are stuck between the valve cover and the pump cover, and the outlet valve and the inlet valve are formed by sticking piezoelectric films and substrates. A pump cavity membrane is in pressure welding between the pump cover and the pump body, and a piston and an ejecting block are respectively installed at two sides of the pump cavity membrane. The piston, the pump cover, the outlet valve and the inlet valve together form a pump cavity, and a bolt presses a piezoelectric stack onto the ejecting block through a torsion-proof stop dog. The piezoelectric stack, the outlet valve and the inlet valve are respectively connected with an electrical control unit through a conductor group 1, a conductor group 2 and a conductor group 3. The self-measurement piezoelectric stack pump has the advantages that a one-way valve with a sensing function is utilized to directly measure the output pressure and flow of the piezoelectric pump, and an additional sensor is not needed, so that the structure is simple, and the accuracy and the reliability of the measuring precision are higher; and the self-measurement piezoelectric stack pump is suitable for real-time monitoring in the pumping process of different media such as liquid, gas, gas-liquid mixtures and the like.

Description

technical field [0001] The invention belongs to a piezoelectric pump used in the field of microfluidic transmission control, in particular to a self-measurement piezoelectric stack pump. Background technique [0002] Piezoelectric pumps have many advantages such as simple structure, small size, quick response, no electromagnetic interference, easy operation, good flow and pressure controllability, etc. etc. have broad application prospects, so its research and development has attracted extensive attention from scholars all over the world. In order to meet the application requirements in different fields, piezoelectric pumps with various structures have been proposed. Although the structure and performance of the proposed piezoelectric pumps are quite different, they all use the bending or stretching deformation of the piezoelectric vibrator under the action of an electric field to realize fluid drive. Because the fluid output by each working cycle of the piezoelectric pump...

Claims

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Application Information

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IPC IPC(8): F04B43/04
Inventor 马泽辉阚君武张忠华温建明马继杰程光明
Owner ZHEJIANG NORMAL UNIVERSITY
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