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Micro-motion platform for improving resolution of linear motor based on flexible inclined beam

A technology of micro-motion platform and linear motor, which is applied in the direction of workbench, instrument parts, instruments, etc., can solve the problem of small output force of linear motor, and achieve the effect of avoiding nonlinearity, compact structure and avoiding assembly

Inactive Publication Date: 2013-02-13
BEIHANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Using the micro-motion platform with the linear motor can make the resolution of the linear motor reach the nanometer level, and overcome the problem of the small output force of the linear motor

Method used

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  • Micro-motion platform for improving resolution of linear motor based on flexible inclined beam
  • Micro-motion platform for improving resolution of linear motor based on flexible inclined beam
  • Micro-motion platform for improving resolution of linear motor based on flexible inclined beam

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Embodiment Construction

[0038] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0039] See figure 1 , Figure 1A As shown, the present invention is a micro-motion platform for improving the resolution of a linear motor based on a flexible inclined beam. The micro-motion platform is an integrated processing structure, and the micro-motion platform is provided with:

[0040] A base 1;

[0041] Six inclined beam assemblies (first inclined beam assembly 2, second inclined beam assembly 3, third inclined beam assembly 4, fourth inclined beam assembly 5, fifth inclined beam assembly 6, and sixth inclined beam assembly 7);

[0042] Two transition plates (the first transition plate 8, the second transition plate 10);

[0043] Two guide beam components (first guide beam component 12, second guide beam component 13);

[0044] One input board 9, one output board 11, and one output rod 14;

[0045] A first guide beam assembly 12, an output plate 11 and a second...

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Abstract

The invention discloses a micro-motion platform for improving the resolution of a linear motor based on a flexible inclined beam. The micro-motion platform is provided with a base, six inclined beam components, two transition plates, an input plate, an output plate and two guide beam components. An output rod is mounted on the output plate of the micro-motion platform, and an output shaft of the linear motor is connected with the input plate of the micro-motion platform so as to apply the drive force to the micro-motion platform. The micro-motion platform disclosed by the invention has the functions of a two-level speed reducer in the same plane, improves the resolution of the linear motor by use of the motion reducing principle, and overcomes the shortcoming of lower resolution of the linear motor.

Description

Technical field [0001] The present invention relates to a micro-motion platform, and more particularly, to a micro-motion platform based on a flexible inclined beam for improving the resolution of a linear motor. Background technique [0002] In precision engineering, the end effector is generally required to have a nanometer resolution, and the resolution of the end effector depends on the resolution of the selected driver. At present, the most common high-precision drivers mainly include piezoelectric ceramics and voice coil motors. [0003] Piezoelectric ceramics is an inorganic non-metallic material that converts mechanical energy and electrical energy into each other. When pressure is applied to the piezoelectric material, it will generate a potential difference, and vice versa, when a voltage is applied, mechanical force is generated. It has the advantages of stability, continuity, fast response, nanometer precision and large output force, but the range of motion is very sma...

Claims

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Application Information

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IPC IPC(8): G12B5/00B25H1/00
Inventor 孙先涛陈伟海周锐张建斌
Owner BEIHANG UNIV
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