Intelligent three-direction acceleration sensor

Abstract

The invention discloses an intelligent three-direction acceleration sensor, which comprises a substrate, a sensitive core, an insulated isolating ring, a pressing ring, an inner cover, a shell, an upper cover, a circuit board, positioning supports, leads, an output socket and a self-detection socket, wherein the sensitive core is arranged in the substrate through the pressing ring; the insulated isolating ring is arranged below the pressing ring to suspend the sensitive core; the inner cover shields a substrate package in the substrate; the circuit board is arranged on the substrate through the positioning supports, and is connected with the sensitive core through the leads; the shell is arranged on the substrate, and is provided with the output socket and the self-detection socket; the output socket is connected with the circuit board; the self-detection socket and the sensitive core are respectively connected with the circuit board; and the shell is provided with the upper cover. The sensor has high sensitivity and operating temperature of 260DEG C, has a small size, high reliability, small three-direction interference and excellent performance, has a self-detection function, and ensures the accuracy and reliability of signals of the whole sensor.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to an intelligent three-way acceleration sensor. Background technique [0002] Vibration measurement principles include piezoresistive measurement, capacitive measurement and piezoelectric measurement. The sensitive core of the piezoresistive acceleration sensor is a resistance measuring bridge made of semiconductor material, and its structural dynamic model is still a spring-mass system. The ultra-miniature design is its highlight, but the disadvantage is that it is greatly affected by temperature and must be Temperature compensation. The structural form of the capacitive acceleration sensor also adopts the spring mass system. In actual use, it is mostly used for low-frequency measurement. Its versatility is not as good as that of the piezoelectric acceleration sensor. The nonlinearity is poor, the range is limited, and the cost is high. [0003] Piezoelectric acceler...

AI Technical Summary

Problems solved by technology

The sensitive core of the piezoresistive acceleration sensor is a resistance measuring bridge made of semiconductor material, and its structural dynamic model is still a spring-mass system. The ultra-miniature design is its highlight, but the disadvantage is that it is greatly affected by temperature and must be Temperature compensation

The structural form of the capacitive acceleration sensor also adopts the spring mass system. In actual use, it is mostly used for low-frequency measurement. Its versatility is not as good as that of the piezoelectric acceleration sensor. The nonlinearity is poor, the range is limited, and the cost is high.

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