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Measuring device and method of axicon mirror surface shape

A measuring method and technology of measuring device, applied in the field of optical detection

Active Publication Date: 2015-08-12
BEIJING GUOWANG OPTICAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method needs to use the rotation of the mirror to adjust the inclination of the reference beam relative to the measurement beam, so that they interfere, and then solve the surface shape information of the axicon mirror. At the same time, this method can only measure the surface shape of the axicon mirror with a large cone angle.

Method used

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  • Measuring device and method of axicon mirror surface shape
  • Measuring device and method of axicon mirror surface shape
  • Measuring device and method of axicon mirror surface shape

Examples

Experimental program
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Effect test

Embodiment 1

[0028] Example 1 - Detecting the surface shape of a convex axicon

[0029] figure 2 The optical path diagram of the convex axicon measured by the axicon surface shape detection device of the present invention can be seen from the figure, the axicon 3 to be measured in embodiment 1 of the present invention is a convex axicon, and the steps of measuring the convex axicon surface shape are as follows:

[0030] ①The axicon lens 3 to be measured is placed between the parallel beam direction plane standard mirror 2 output by the phase-shifting interferometer 1 and the focusing lens 4, and the tapered surface of the axicon lens 3 to be measured faces the side of the phase-shifting interferometer 1 light direction;

[0031] ②Adjust the optical path: the beam emitted by the phase-shifting interferometer 1 forms a parallel measuring beam through the plane standard mirror 2, and the beam returned by the plane standard mirror 2 forms a reference beam; adjust the plane standard The para...

Embodiment 2

[0045] Embodiment 2 - Measuring the surface shape of a convex axicon mirror

[0046] Figure 4 For the optical path diagram of the concave axicon mirror measured by the axicon mirror surface shape detection device of the present invention, it can be seen from the figure that the axicon mirror 3 to be measured in embodiment 2 is a concave surface axicon mirror, and the steps of measuring the concave surface axicon mirror surface shape are as follows:

[0047] ①In the direction of the parallel light beam output by the phase-shifting interferometer 1, the plane standard mirror 2, the concave axicon mirror 3 to be measured, the focusing lens 4 and the plane mirror 5 are sequentially inserted, and the conical surface of the axicon mirror 3 to be measured faces The light output direction of the phase-shifting interferometer 1;

[0048] ②Adjust the optical path: the beam emitted by the phase-shifting interferometer 1 forms a parallel measuring beam through the plane standard mirror 2,...

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Abstract

The invention discloses a measurement device and a measurement method for an axicon surface shape. The device consists of a phase-shifting interferometer, a plane standard mirror, a focusing lens and a plane reflecting mirror; the position relation is that the plane standard mirror, the focusing lens and the plane reflecting mirror are arranged along the forward direction of an outgoing beam of the phase-shifting interferometer in sequence; and a socket for an axicon to be detected is formed between the plane standard mirror and the focusing lens. The device has a simple structure; and the measurement method is convenient to operate.

Description

technical field [0001] The invention relates to optical detection, in particular to a measurement device and method for measuring the surface shape of an axicon mirror. technical background [0002] The axicon is a rotationally symmetric optical element whose focal line is along the optical axis. Due to its long focal depth and narrow lateral width, it is widely used in laser beam shaping, laser drilling technology, optical detection, laser resonance In terms of devices, etc., this puts forward strict requirements on the surface shape accuracy of the axicon mirror, so an accurate method is needed to measure its surface shape. [0003] Prior art [1] (David Kupka, Philip Schlup, and Randy A.Bartels, "Self-referenced interferometry for the characterization of axicon lens quality", Appl.Opt.47(9):1200-1205(2008).) A simple interferometer for the measurement of the properties of an axicon mirror. The light wave passing through the axicon mirror under test interferes with the co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 袁乔曾爱军张善华黄惠杰
Owner BEIJING GUOWANG OPTICAL TECH CO LTD
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