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Liquid-replenishing device

一种补液装置、储液罐的技术，应用在运输和包装、使用液体的清洁方法、气体/液体分配与储存等方向，能够解决体积大、成本高、控制和结构复杂等问题，达到保证工艺效果、操作简单的效果

Active Publication Date: 2013-01-16
BEIJING SEVENSTAR ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, metering pumps are mostly used for the supply of liquid medicine or ultrapure water, which require signal control or feedback. Although accurate supply can be achieved, the volume is large and the corresponding control and structure are relatively complicated, and the cost is high.

Method used

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  • Liquid-replenishing device

Examples

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Embodiment Construction

[0017] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0018] Such as figure 1 As shown, the liquid replenishment device provided by the present invention includes: two liquid storage tanks (1, 2) in parallel, and a chemical liquid supply pipeline (3, 4) Ultrapure water supply pipelines (5, 6) for supplying ultrapure water to the liquid storage tanks (1, 2), and ultrapure water supply lines (5, 6) for quantitatively supplying ultrapure water to the liquid storage tanks (1, 2). Water quantitative supply pipelines (7, 8) and circulation pipelines (10, 11), one end of the circulation pipeline (10, 11) is connected to the liquid outlet of the liquid storage tank (1, 2), and the other end Connect the reservoir (1, 2) inlets.

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PUM

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Abstract

The invention discloses a liquid-replenishing device, which comprises a liquid storage tank, a chemical liquid medicine supply pipeline, an ultrapure water supply pipeline, an ultrapure water quantitative supply pipeline and a circulating pipeline, wherein the chemical liquid medicine supply pipeline provides chemical liquid medicine for the liquid storage tank; the ultrapure water supply pipeline provides ultrapure water for the liquid storage tank; the ultrapure quantitative supply pipeline quantitatively replenishes ultrapure water for the liquid storage tank; and one end of the circulating pipeline is connected with a liquid outlet of the liquid storage tank, and the other end of the circulating pipeline is connected with an inlet of the liquid storage tank. The liquid-replenishing device can quantitatively replenish liquid at regular time along with repeated use of the chemical liquid medicine and change of the concentration of the liquid medicine, and the certain concentration of the liquid medicine can be maintained, so that a process effect is guaranteed, and the liquid-replenishing device is simple in operation.

Description

technical field [0001] The invention relates to the technical field of semiconductor cleaning, in particular to a liquid replenishing device. Background technique [0002] In the semiconductor industry, silicon wafers need to be cleaned in many processes. Various chemical liquids are used in the cleaning process, and the concentrations and composition ratios of various chemical liquids are different. When the mixing ratio Sometimes or after a period of use, the concentration of the liquid medicine will change, and a certain amount of liquid medicine or ultrapure water needs to be supplied. In general, the chemical liquid needs to be placed in a chemical container (such as a tank or a tank). First, a certain volume of chemical liquid is added to the container, and the concentration of the chemical liquid has met the required concentration. The chemical liquid in the container will be used repeatedly during use, and the concentration of the chemical liquid will change during ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17D1/14
CPCH01L21/02041H01L21/67017B08B3/00B08B3/14Y10T137/6416Y10T137/85954Y10T137/4673
Inventor 初国超何金群王营营裴立坤
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD
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