Container, system and method for blending mixture

Abstract

The invention relates to a container, a system and a method for blending a mixture. The container comprises a container body and accommodating bags, wherein the accommodating bags are arranged in the container body; the container body comprises a body, a first end cover and a second end cover; the first end cover and the second end cover are arranged at two ends of the body respectively and are hermetically connected with the body; a first annular groove, a second annular groove and an annular gear rack are arranged on the outer side wall of the body; the annular gear rack is positioned between the first annular groove and the second annular groove; and each component of the mixture to be blended is accommodated in the respective accommodating bag hermetically, and the weight of each component meets the requirement of the blending ratio of the mixture to be blended.

Description

technical field [0001] The invention relates to semiconductor manufacturing technology, in particular to a mixture configuration container, a configuration system and a configuration method. Background technique [0002] Most of the chemicals used in the semiconductor manufacturing process are mixtures, for example, the slurry used in the polishing process. In the prior art, in order to configure the mixture, the chemical substances of each component must first be purchased, and then the parts of each component are weighed out according to the configuration ratio requirements, and the weighed components are mixed together, and then stirred to make The various components are thoroughly mixed, and in the semiconductor manufacturing industry, a special mixture dispensing system is also equipped for disposing the mixture. [0003] The polishing liquid used in chemical mechanical planarization (CMP) technology is usually made of a mixture of multiple components. The polishing li...

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Problems solved by technology

[0004] The process of configuring the mixture in the prior art requires manual weighing of each component, which is not only cumbersome to operate, but also prone to errors or errors, for example, the accuracy of the weighing tool is not high enough, or there is a problem with the weighing tool. Undetected or errors occurred in the weighing operation but the weigher did not notice

In addition, the cost of a special mixture configuration system is usually relatively expensive (for example, the price of a grinding liquid configuration tank is more than 100,000 US dollars), and some mixtures need to be stored for a period of time after configuration, which requires more than two sets of mixture configuration systems. Increased production investment costs

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