Ultrahigh vacuum fast scanning microscopy method based on carbon nanotube probe
A technology of carbon nanotubes and ultra-high vacuum, which is applied in the field of scanning probe microscopy, can solve problems such as firing pins or detachment, poor reliability of constant height mode, etc., and achieve the effects of increased speed, reliable scanning, and high reliability
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[0024] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.
[0025] see figure 1 Firstly, the carbon nanotube 3 is fixed on the end of the scanning tunneling microscope probe 2 to ensure that the carbon nanotube 3 and the scanning tunneling microscope probe 2 have reliable mechanical connection, electrical connection, coaxial or parallel axis. Then, the scanning tunneling microscope probe 2 fixed with the carbon nanotube 3 is clamped to the probe holder 1, and the probe holder 1 is sent to the corresponding position of the ultra-high vacuum scanning tunneling microscope equipment, and the sample to be tested is placed 6 on sample stage 7. Finally, the scanning tunneling microscope equipment is adjusted to the vacuum state of the scanning test, and the field emission current 5 of the carbon nanotube 3 is used as the detection signal to perform rapid imaging scanning of the sample 8 to be tested under th...
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