Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect

Abstract

The invention provides a vertical axis silicon micro resonant mode accelerometer based on a negative stiffness effect. The accelerometer (100) comprises a first outer mass block (101), a first plane resonator (103a) arranged in the first outer mass block (101) and connected with the first outer mass block (101), a second outer mass block (102) arranged on the right side of the first outer mass block (101) and connected with the first outer mass block (101) and a second plane resonator (103b) arranged inside the second outer mass block (102) and connected with the second mass block (102). The vertical axis silicon micro resonant mode accelerometer is simple in structure and compatible with planar process, solves the problems in a conventional resonant accelerometer that design and machining of a long and thin resonant beam are hard and the like, and simultaneously reduces effects of stress and temperature on performance of the accelerometer. In addition, the planar structure characteristic of the accelerometer is favorable for achieving of multi-axis assembly.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems (MEMS) and micro-inertia measurement, and in particular relates to a silicon micro-resonance accelerometer. Background technique [0002] Silicon microresonant accelerometer is a kind of high precision miniature accelerometer. Different from the general capacitance detection accelerometer, the silicon resonant accelerometer converts the measured acceleration into the frequency change of the resonator, and directly outputs the digital signal, with high sensitivity and resolution, wide dynamic range, strong anti-interference ability and good stability , signal processing and other advantages, making it the development direction of a new generation of high-precision micro-mechanical accelerometers. In 2005, Draper Laboratory in the United States developed a high-precision silicon microresonant accelerometer. The best performance indicators of the laboratory are: bias stabili...

AI Technical Summary

Problems solved by technology

However, the resonators, capacitive actuators and signal sensors in the vertical plane, due to their linearity, process compatibility and other defects, make it difficult to realize the vertical axis silicon microresonant accelerometer with the same technology as the in-plane

Very few vertical-axis silicon microresonant accelerometers implemented by means of electromagnetic excitation and piezoresistive detection also have defects such as poor process compatibility, low precision, and poor temperature characteristics.

In addition, from the perspective of multi-axis integration, the current vertical-axis silicon microresonant accelerometer is difficult to integrate with the in-plane silicon microresonant accelerometer due to incompatible processes.

Images