On-site self-calibration method for measurement system error of precise rotary table

Abstract

The invention discloses an on-site self-calibration method for measurement system error of a precise rotary table and belongs to the field of precision processing and measurement. A glass plate with sector-shaped scribed lines is adopted as an auxiliary measurement device and is fixed on the rotary table and an angle sensor which is arranged on the rotary table is used for reading out the angle corresponding to each sector-shaped scribed line on the glass plate; the glass plate is rotated for a certain angle relative to the rotary table and the angle sensor is used for reading out the angle corresponding to each scribed line at the attitude; aiming at the measurement data at the two attitudes, a measurement system error equation with transitive property is constituted and the system error can be obtained by the closed circle principle of rotational degree of freedom to complete on-site self-calibration of measurement system error of the precise rotary table. By adopting the method provided by the invention, the function of calibrating high precision rotary tables by utilizing low precision sector-shaped scribed lines can be realized without high-precision calibration tools. The method has the advantage of high calibration precision and is applicable to precision rotary tables with various angle sensors.

Description

technical field [0001] The invention relates to an in-situ self-calibration method for the error of a precision rotary worktable measurement system, which belongs to the field of precision machining and measurement. Background technique [0002] Precision rotary tables are widely used in various industrial automation systems, including machining centers, CNC machine tools, robots, production lines, etc., and are receiving more and more attention in the high-precision equipment industry. Due to the deformation of the rotary table and the inaccurate measurement of the angle sensor caused by the manufacturing process, assembly and non-centroid drive, the rotation angle θ n The actual rotation angle θ with the table a There is a certain deviation between them, that is, the systematic error G n ,Such as figure 2 shown. This will greatly reduce the positioning and motion accuracy of the rotary table, thereby affecting the processing and detection accuracy of precision machinin...

AI Technical Summary

Problems solved by technology

However, this method makes full use of the characteristics of the electromagnetic induction angle sensor, and is only suitable for rotary tables with electromagnetic induction sensors, not for rotary tables with other types of angle sensors.

[0005] According to the above background, the current problem in the self-calibration of the rotary table is: the lack of a self-calibration method for the rotary table suitable for various types of angle sensors

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