Self-calibration method for measuring system of three-dimensional large-stroke density workbench

Abstract

The invention discloses a self-calibration method for a measuring system of a three-dimensional large-stroke density workbench, and belongs to the field of precise machining and measurement. The method comprises the following steps: performing self-calibration on the three-dimensional workbench on a regional basis respectively with a three-dimensional self-calibration principle by taking a cubic optical glass block with a uniform grid array as an auxiliary measuring device to obtain the system error of each region; performing system error compensation on corresponding regions; performing linear fitting on the obtained discrete point coordinate of each region; performing coordinate system correction processing on the calibration coordinate systems of adjacent regions in sequence according to a planned sequence to obtain a uniform calibration coordinate system in a whole region, and finishing self-calibration of the three-dimensional large-stroke density workbench measuring system finally. By adopting the method, the large-stroke and high-accuracy self-calibration of the three-dimensional workbench is realized; meanwhile, the function of the high-accuracy three-dimensional workbench is calibrated by using the cubic glass block with the low-precision grid array without any high-accuracy calibration tool, and high calibration accuracy is achieved; the method is suitable for calibrating various three-dimensional precise workbenches.

Description

technical field [0001] The invention relates to a self-calibration method for a three-dimensional large-stroke high-precision workbench measurement system, belonging to the field of ultra-precision processing and measurement. Background technique [0002] The application of ultra-precision worktables in the field of precision engineering is gradually widespread, and the requirements for the measurement accuracy of multi-dimensional workbenches are getting higher and higher. In ultra-precision machining and testing equipment, the requirements for the movement and positioning accuracy of multi-dimensional workbenches are often at the nanometer level. Among them, for the three-dimensional precision workbench with large stroke and large range, limited by the current manufacturing and measurement level, the standard measurement tools required by the traditional workbench calibration method cannot be easily obtained for traditional calibration work, resulting in the ultra-precision...

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Problems solved by technology

However, for the actual 3D workbench, what needs to be calibrated may be a large range of workbench area, or a non-cuboid area such as a cube shape. The current self-calibration method cannot easily obtain the required large-scale area of ​​the 3D workbench. The systematic error G m,n,k , and the existing self-calibration methods do not have an effective method for large-stroke and large-scale three-dimensional workbench calibration, and the original self-calibration technology cannot solve such problems

[0005] According to the above background, the current problems faced by the self-calibration method for the three-dimensional workbench are: the lack of a self-calibration method suitable for large-stroke and large-range workbenches, and the face of large-scale and irregular shapes (such as non-cube shapes) area, there is no proven solution

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