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Active Control Magnetic Suspension Vibration Isolation Platform

A vibration isolation platform, active control technology, applied in the direction of magnetic attraction or thrust holding device, electrical components, etc.

Active Publication Date: 2014-10-15
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the shortcomings of existing vibration isolation platforms with fixed frequencies, the present invention proposes an active control type magnetic suspension vibration isolation platform

Method used

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  • Active Control Magnetic Suspension Vibration Isolation Platform
  • Active Control Magnetic Suspension Vibration Isolation Platform
  • Active Control Magnetic Suspension Vibration Isolation Platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0033] Embodiment 1: The active control type magnetic suspension vibration isolation platform described in this embodiment includes a moving base plate, a fixed base plate, four Z-direction load-bearing units and an adjustment unit; the four Z-direction load-bearing units and adjustment units are located between the moving base plate and the between the fixed base plates, and the line between the center of the quadrilateral formed by the four Z-direction load-bearing units and the adjustment unit and the center of the movable base plate is perpendicular to the plane where the movable base plate is located, and the Z-direction load-bearing and adjustment unit includes a Z-direction load-bearing unit and Z-direction adjustment unit,

[0034]Z-direction load-bearing unit includes stator permanent magnet 2c, stator permanent magnet fixing plate 2d, mover permanent magnet 2b and mover permanent magnet fixing plate 2a, stator permanent magnet 2c is fixed on the upper surface of stato...

Embodiment approach 2

[0038] Embodiment 2: This embodiment is a further limitation on the structure of the Z-direction adjustment unit in the active control type magnetic suspension vibration isolation platform described in Embodiment 1. The primary stage of the Z-direction adjustment unit described in this embodiment includes a primary iron core 1b And the primary winding 1c, the primary iron core is an E-shaped iron core, the primary winding 1c is wound on the core column in the middle of the primary iron core; the secondary includes the secondary permanent magnet 1d and the secondary yoke plate 1e, and the secondary permanent magnet 1d is 3 pieces The flat-shaped permanent magnets magnetized in parallel in the vertical direction, the three flat-shaped permanent magnets correspond to the three core columns of the primary iron core respectively, and the three flat-shaped permanent magnets are pasted and fixed on the secondary yoke plate 1e, The magnetization direction of the flat permanent magnet l...

Embodiment approach 3

[0039] Embodiment 3: This embodiment is to further limit the structure of the Z-direction adjustment unit in the active control type magnetic suspension vibration isolation platform described in Embodiment 1. The primary iron core 1b, primary Winding 1c and primary permanent magnet 1a, the primary iron core 2b is composed of two Γ-shaped iron cores, the primary permanent magnet 1a is a flat plate, fixed in the middle of the horizontal section of the two Γ-shaped iron cores; the primary winding 1c is composed of two coils, two The two coils are respectively wound on the two vertical core posts of the Γ-shaped iron core; the secondary is the high magnetic permeability metal plate 1f.

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Abstract

The invention relates to an active-control magnetic-levitation vibration-isolating platform, which relates to the technical field of the vibration-isolating platform. The invention aims at solving the weakness that the existing vibrating-isolating platform has fixed frequency. The active-control magnetic-levitation vibration-isolating platform mainly consists of a movable substrate, a stationary substrate and three or four Z-directional bearing and adjusting units, wherein the Z-directional bearing and adjusting units comprise Z-directional bearing units and Z-directional adjusting units, a stator permanent magnet of each Z-directional bearing unit is fixed on a stator permanent magnet fixed plate, and a movable permanent magnet is fixed beneath an active cell permanent magnet fixed plate; and each stator permanent magnet corresponds to one active cell permanent magnet, a clearance is kept between each stator permanent magnet and each active cell permanent magnet, the magnetizing direction of the stator permanent magnet is opposite to that of the active cell permanent magnet. A primary level of each Z-directional adjusting unit comprises a primary iron core and a primary winding, and a secondary level of each Z-directional adjusting unit comprises a secondary permanent magnet and a secondary yoke plate. The active cell permanent magnet fixed plate of the Z-directional bearing unit is connected with an active cell of the Z-directional adjusting unit along the Z direction. The structure of the active-control magnet-levitation vibration-isolating platform is applicable to the heavy load and is simple in structure, high in vibration-isolating precision, easy to control and applicable to the vacuum environment.

Description

technical field [0001] The invention relates to a magnetic suspension vibration isolation platform. Background technique [0002] With the continuous development of science and technology, in some technical fields, such as aerospace, and precision optical systems, the processing accuracy of some key parts is required to be higher and higher, thus requiring precision and ultra-precision processing technology. In precision and ultra-precision machining, the accuracy of the equipment itself is of course crucial, but the impact of environmental vibration on machining accuracy and surface quality cannot be ignored. Environmental vibration will not only cause the machine tool body to vibrate, but more importantly, it will generate relative vibration displacement between the cutting tool and the processed workpiece, which will directly reflect the precision and surface quality of the processed parts. Therefore, it is very necessary to set up vibration isolation devices with excell...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N15/00
Inventor 寇宝泉周一恒罗俊张赫
Owner HARBIN INST OF TECH
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