Flat-type air vibration isolator

Abstract

The invention discloses a flat-type air vibration isolator, wherein the vibration isolator comprises three or four main chambers and three or four additional air chambers; the three main chambers are arranged in a triangular mode; four main chambers are arranged in a quadrilateral mode; and the additional air chambers are arranged in parallel in a space formed by the main chambers. Compared with the traditional dual-chamber air vibration isolator, the vibration isolator provided by the invention has the advantages that a lower chamber of the traditional air spring is replaced by additional air chambers with damping holes, the defect that the volume and damping holes of the lower chamber of the traditional air vibration isolator are unchanged is eliminated, and meanwhile a structure with an upper chamber and the lower chamber in separation is adopted, the center of gravity of the air vibration isolator is lowered, thus the air vibration isolator is more stable, and the air vibration isolator is mainly applied to the vibration isolation of devices, such as an ultra-precise test bed, an ultra-precise machine tool, an optical table.

Description

technical field [0001] The invention relates to an air vibration isolator for isolating vibration from the outside. The vibration isolator is mainly used in optics, ultra-precision detection, ultra-precision machining and other fields. Background technique [0002] In the field of ultra-precision, since the internal and external vibration interference of mechanical equipment is one of the important factors that reduce the machining accuracy and surface quality, precision and ultra-precision machining have increasingly stringent environmental requirements. The quality of ultra-precision machining is not only related to the amplitude of vibration interference, but also related to the frequency of vibration interference. The vibration frequency that has an adverse effect on ultra-precision machining is a slight vibration in the range of 0.5-5Hz. The vibration control method is commonly used to eliminate Vibration, vibration isolation and vibration absorption, and vibration iso...

AI Technical Summary

Problems solved by technology

At present, the double-chamber air vibration isolator is used by stacking the upper and lower chambers. Its center of gravity is high, and it will deflect during use, and the stability of the system is poor.

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