Switching structure and switching method for double workpiece tables

A technology of double worktable and exchange structure, which is applied in the direction of photolithography exposure device, microlithography exposure equipment, etc., can solve the problems of time waste, poor flexibility, and difficult design of air flotation structure, and achieve high efficiency and simple structure , the effect of saving exchange time

Active Publication Date: 2012-07-11
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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AI Technical Summary

Problems solved by technology

However, in this exchange structure, the long-stroke X-direction eccentric drive makes it difficult to design the air-floating structure, and the two workpiece tables require synchronous control and exchange. If the working time of one workpiece table is shorter than that of the other workpiece table, it needs to wait, resulting in Waste of time and poor flexibility

Method used

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  • Switching structure and switching method for double workpiece tables
  • Switching structure and switching method for double workpiece tables
  • Switching structure and switching method for double workpiece tables

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Embodiment Construction

[0028] The double-workpiece exchange structure and its exchange method of the present invention will be further described in detail in conjunction with the accompanying drawings.

[0029] See figure 1 , the double worktable exchange structure of the present invention includes two short-stroke structures 1 and 2, two long-stroke structures 3 and 4, and two bearing mechanisms 5 and 6;

[0030] The two long-stroke structures 3 and 4 are arranged parallel to each other on a horizontal plane;

[0031] The short-stroke structure is arranged on the long-stroke structure, can float perpendicular to the horizontal plane, and move in the horizontal plane along the long-stroke structure;

[0032] The two carrying mechanisms 5 and 6 are arranged between the two long-stroke structures 3 and 4, and the connecting line of the two carrying mechanisms 5 and 6 is parallel to the two long-stroke structures 3 and 4;

[0033] The short-stroke structure can move along the carrying mechanism in a ...

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Abstract

The invention relates to a switching structure and a switching method for double workpiece tables. The switching structure for the double workpiece tables comprises two short-stroking structures, two long-stroking structures and two load bearing mechanisms, wherein the two long-stroking structures are arranged in parallel mutually on a horizontal plane formed by a first direction and a second direction which are vertical mutually; the short-stroking structures are arranged on the two long-stroking structures, can be floated vertically to the horizontal plane, and are moved in the horizontal plane along the long-stroking structures; the two load bearing mechanisms are fixedly arranged between the two long-stroking structures; a ligature of the two load bearing mechanisms is parallel to the two long-stroking structures; and the short-stroking structures are moved in a direction vertical to the long-stroking structures in the horizontal plane along the load bearing mechanisms, and are shifted between the two long-stroking structures through the load bearing mechanisms. According to the switching structure and the switching method for the double workpiece tables, the double workpiece tables not only can be switched synchronously, but also can be switched asynchronously, the structure is simple, the switching is convenient, and the work is flexible.

Description

technical field [0001] The invention relates to microelectronic equipment, in particular to a double-workpiece exchange structure and an exchange method thereof. Background technique [0002] The feature of the double work table technology is that one work table scans and measures, and at the same time, the other work table scans and exposes, which can not only increase the productivity, but also ensure the measurement time and improve the measurement accuracy. [0003] U.S. Patent US6262796B1 discloses a double workbench exchange method: the workbench of the first station and the workbench of the second station realize the exchange of the first position and the second position through the exchange system, and the two workbenches adopt side hanging mode to realize dual-station exchange. However, in this exchange structure, the long-stroke X-direction eccentric drive makes it difficult to design the air-floating structure, and the two workpiece tables require synchronous con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
Inventor 赵辉杨志勇
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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