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Measuring method for thickness of extremely thin covering layer

A measurement method and thickness measurement technology, applied in the field of measurement, can solve problems such as inability to carry out measurement work, and achieve the effects of effective measurement and arbitration, effective measurement, and reliable conclusions

Inactive Publication Date: 2012-07-11
AVIC STANDARD PARTS MFG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, ordinary enterprises cannot have such conditions and cannot carry out such measurement work

Method used

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  • Measuring method for thickness of extremely thin covering layer
  • Measuring method for thickness of extremely thin covering layer
  • Measuring method for thickness of extremely thin covering layer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] Using the method for measuring the thickness of the ultra-thin coating layer of the present invention, the sample of the thickness of the ultra-thin coating layer on the plane is intercepted and measured.

[0045] The intercepted surface of the sample is obliquely intersected with the surface of the covering layer (that is, the surface of the substrate). The angle α of the oblique intersection can be set in advance, or it can be measured after intercepting the sample. The geometric relationship of the coating thickness b on the image 3 As shown, the conversion is carried out according to the final measured value δ=bsinα, and the converted value is taken as the final measured value.

Embodiment 2

[0047] Sample interception and measurement of thickness of extremely thin coating on cylindrical surface

[0048] The intercept surface is oblique to the axis of the cylinder. At this time, the covering layer on the detection surface is an ellipse ring. At the short axis of the ellipse, the section is perpendicular to the surface of the covering layer. The thickness reading is a. The angle between the surface of the layer transitions from 90 degrees to α, and the thickness value measured under the microscope is from a to b, see Figure 4 , the b value should be taken as the reading of the thickness measurement, and converted according to the final measured value = bsinα, and the converted value is taken as the final measured value (the value of α can be measured after cutting the sample).

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Abstract

The invention discloses a measuring method for the thickness of an extremely-thin covering layer, comprising the following steps of: sampling in a way of being obliquely crossed with a covering layer on a metallographic specimen, and measuring the thickness value of the specimen through a microspore according to Measuring Methods for Thickness of Metal and Oxide Coating by Microscopical Examination specified in the GB6462-86 standard, wherein a manufacturing method of a specimen matrix comprises the following steps of: intercepting a specimen along an intercepting surface vertical to the covering layer to obtain a section as a detected surface, and measuring the thickness value a of the detected surface; and intercepting a detection amplifying surface on a surface obliquely crossed with the surface of the covering layer to form an included angle alpha, and measuring the thickness value b of the detection amplifying surface; and finally, obtaining a measured value delta=bsinalpha.

Description

technical field [0001] The invention relates to measurement technology, in particular to methods for measuring the thickness of extremely thin overlays. Background technique [0002] For the thickness measurement and arbitration of metal coating and oxide coating products, enterprises widely adopt GB6462-86 "Measurement Method of Metal and Oxide Coating Cross Section Thickness Microscope". As a method for measuring the thickness of metal and oxide coatings, this standard is equivalent to the international standard ISO1463-1982 "Measurement method for the thickness of metal and oxide coatings in cross-section by microscopy". Clause 5 of this standard describes and stipulates the measurement accuracy as follows: the use and calibration of the microscope and its accessories, as well as the preparation method of the cross-section should be selected so that the error of the thickness of the coating to be measured is within 1 μm or the actual thickness. Within the smaller value o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/06
Inventor 程祥勇廖立新
Owner AVIC STANDARD PARTS MFG
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