Method for correcting flat field of two-dimensional optical detection

Abstract

The invention relates to a method for correcting a flat field of two-dimensional optical detection. A first optical filter is arranged between a CCD (Charge Coupled Device) and at least one reference illuminator. The reference illuminator is moved relative to the CCD, so as to utilize the CCD to capture a plurality of individual images and integrate a flat field message. Accordingly, a first light intensity correcting field profile is calculated, thereby obtaining a first light intensity correcting rate corresponding to each image coordinate in an image coordinate system of CCD. After a deviated projecting detection image of at least one to-be-detected illuminator is captured by the CCD, a corrected light intensity value corresponding to each image coordinate in the deviated projecting detection image is calculated according to the first light intensity correcting rate, so as to obtain a light intensity correcting detection image.

Description

technical field [0001] The invention relates to a correction method for optical detection, in particular to a flat-field correction method for two-dimensional optical detection. Background technique [0002] In a two-dimensional optical inspection system, when the same object to be measured is located at different positions on the plane to be measured, the same detection results should be detected in order to maintain the consistency of detection, and then accurately detect the defects of the object to be measured itself . However, in the actual inspection, the consistency of the inspection will be affected by factors such as the vignetting effect of the lens, the sensitivity difference of different pixels of the charge-coupled device, the unevenness of the filter itself, and dust contamination, resulting in errors in the inspection . [0003] see figure 1 , which is a schematic diagram of a two-dimensional optical detection system for detection. As shown in the figure, ...

AI Technical Summary

Problems solved by technology

[0010] The first purpose of the present invention is to solve the problem in the prior art that the flat-field correction image (Flat-Field Frame) captured by the planar light source cannot completely correspond to the luminous field type of the LED unit to be tested, resulting in the inability to completely calibrate the LED to be tested. The problem of non-uniform light intensity in the detection image of the unit's deviation from the orthographic projection

[0011] The second purpose of the present invention is to solve the problem that in the prior art, the flat-field corrected image captured by the planar light source cannot reflect the phenomenon of uneven chromaticity of the LED unit matrix to be tested, and cannot correct the deviation from the normal projection detection image. The problem of uneven color

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