Electrochemical micromachining method for ZnO substrate with high-frequency alternating-current (AC) electric heating technology

Abstract

The invention relates to an electrochemical micromachining method for a ZnO substrate with a high-frequency AC electric heating technology. The method is characterized in that the method comprises the following steps: 1, preparing a corrosion solution containing NaNO2; 2, providing a high-frequency AC electric heater and a scanning electrochemical microscope (SECM), and fixing the heating microelectrode of the high-frequency AC electric heater on the SECM; and 3, putting a nano-wire or a film for synthesizing ZnO in the corrosion solution as a micromachining substrate, allowing the heating microelectrode to approach the ZnO substrate through the approximation device of the SECM, and adjusting the temperature of the heating microelectrode to carry out micromachining on the ZnO substrate. The method of the invention, which has the advantages of electrochemical micromachining efficiency improvement, controllable machining resolution and simplicity, has a good practicable value.

Description

Technical field [0001] The invention relates to an electrochemical micromachining, in particular to a processing method for etching and processing micro / nano structures on the surface of a ZnO substrate by using a thermal microelectrode that uses high-frequency alternating current for heating and a scanning electrochemical microscope. Background technique [0002] The electrochemical machining method based on micro / nano electrodes is an effective tool that can be processed on the micron and nanoscale after the development of electrochemical scanning probe microscope (ECSPM) and scanning electrochemical microscope (SECM). This type of technology can perform in-situ on-site imaging while surface micromachining, thus occupying an extremely important position in the study of electrochemical micromachining mechanism and mechanism. Current research in this area includes the SECM (scanning electrochemical microscope)-based etching processing method proposed by the Bard research group an...

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Problems solved by technology

Usually, researchers change the temperature of the electrolyte through instruments and equipment such as constant temperature water baths. This method changes the temperature slowly and will affect the potential of the reference electrode; in addition, when the research system is an organic solution system or an ionic liquid , liquid volatilization intensifies, which will damage human health and pollute the environment

Freyland and others have developed a high-temperature scanning tunneling microscope. He first sealed the liquid chamber and then heated the molten salt system and the probe as a whole, but such a system is expensive and inconvenient to use

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