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Electrochemical micromachining method for ZnO substrate with high-frequency alternating-current (AC) electric heating technology

A high-frequency alternating current and electrochemical technology, applied in scanning probe technology, scanning probe microscopy, measuring devices, etc., can solve the problems of polluting the environment, affecting the potential of the reference electrode, inconvenient to use, etc. The effect of simple, inexpensive processing routes

Inactive Publication Date: 2014-05-07
FUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Usually, researchers change the temperature of the electrolyte through instruments and equipment such as constant temperature water baths. This method changes the temperature slowly and will affect the potential of the reference electrode; in addition, when the research system is an organic solution system or an ionic liquid , liquid volatilization intensifies, which will damage human health and pollute the environment
Freyland and others have developed a high-temperature scanning tunneling microscope. He first sealed the liquid chamber and then heated the molten salt system and the probe as a whole, but such a system is expensive and inconvenient to use

Method used

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  • Electrochemical micromachining method for ZnO substrate with high-frequency alternating-current (AC) electric heating technology
  • Electrochemical micromachining method for ZnO substrate with high-frequency alternating-current (AC) electric heating technology
  • Electrochemical micromachining method for ZnO substrate with high-frequency alternating-current (AC) electric heating technology

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Embodiment 3

[0025] Examples 3-40 The experimental steps are similar to the above-mentioned examples, the difference lies in the frequency of the applied high-frequency alternating current, the concentration of the etching solution, and the etching time. The specific conditions and etching effects are shown in Table 1 (where "+ "Represents good etching effect, "-" represents poor etching effect).

[0026] Table 1

[0027]

[0028] The microelectrode-based heating electrode of the present invention can be applied to electrochemical micro / nano processing technology, and its main advantages are: (1) It is simpler, more convenient and faster than other electrode heating methods; (2) It can obtain And maintain a very high surface temperature for a relatively long period of time. Therefore, it is expected to significantly improve the processing resolution of diffusion-controlled and kinetic-controlled systems; (3) In principle, this method can obtain a smaller heating area than laser spot he...

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Abstract

The invention relates to an electrochemical micromachining method for a ZnO substrate with a high-frequency AC electric heating technology. The method is characterized in that the method comprises the following steps: 1, preparing a corrosion solution containing NaNO2; 2, providing a high-frequency AC electric heater and a scanning electrochemical microscope (SECM), and fixing the heating microelectrode of the high-frequency AC electric heater on the SECM; and 3, putting a nano-wire or a film for synthesizing ZnO in the corrosion solution as a micromachining substrate, allowing the heating microelectrode to approach the ZnO substrate through the approximation device of the SECM, and adjusting the temperature of the heating microelectrode to carry out micromachining on the ZnO substrate. The method of the invention, which has the advantages of electrochemical micromachining efficiency improvement, controllable machining resolution and simplicity, has a good practicable value.

Description

technical field [0001] The invention relates to an electrochemical micromachining, in particular to a processing method for etching and processing micro / nano structures on the surface of a ZnO substrate by using a high-frequency alternating current to heat up a thermal microelectrode combined with a scanning electrochemical microscope. Background technique [0002] The electrochemical processing method based on micro / nano electrodes is an effective tool that can be processed on the micro- and nano-scale after the development of technologies such as electrochemical scanning probe microscopy (ECSPM) and scanning electrochemical microscopy (SECM). This type of technology can also perform in-situ on-site imaging while surface micromachining, thus occupying an extremely important position in the study of electrochemical micromachining mechanism and mechanism. The current research in this area includes the etching processing method based on SECM (scanning electrochemical microscop...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/60
Inventor 汤儆杜琳肖孝建吴挺
Owner FUZHOU UNIV
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