High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge
A technology of flexible hinges and mirrors, applied in installation, optics, instruments, etc., can solve the problems of increasing electrode plate voltage difference, complicated device manufacturing process, increasing liquid micro-wedge prism, etc., to achieve optimized width and thickness, completely consistent Effects of Response Properties
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[0026] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0027]A high-response two-dimensional micro-angle pendulum control mirror based on a biaxial flexible hinge, a biaxial flexible hinge 5 is fixed on the upper surface of the base 4, and a rigid platform 2 is vertically placed on the output end of the biaxial flexible hinge 5. And a two-dimensional micro-angle deflection occurs around the biaxial flexible hinge 5, and the two-dimensional deflection mechanism is composed of the base 4, the biaxial flexible hinge 5 and the rigid platform 2; the reflector 1 is fixed on the upper end surface of the rigid platform 2, and the reflector 1, The rigid platform 2, the biaxial flexible hinge 5 and the center of the base 4 are coaxial; the driving mechanism is composed of four piezoelectric ceramic drivers 3, corresponding piezoelectric ceramic driving power sources 8 and fasteners 7, of which the four piezo...
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Abstract
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