Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof

Abstract

The invention relates to a large-stroke three-translation orthogonal decoupling-type precise micromotion platform and a control method thereof. A laser displacement transducer of a precise micromotion platform system is connected with the input end of a central control unit; the laser displacement transducer is positioned outside of the precise micromotion platform; a displacement detection baffle is mounted on the precise micromotion platform; the laser displacement transducer is corresponding with the displacement detection baffle; the output end of the central control unit is connected with the input end of a power supply of a driver; a multi-path output end of the power supply of the driver is connected with each micro displacement driver; and each micro displacement driver is mounted in the precise micromotion platform. A symmetrical structure is adopted for the precise micromotion platform, the decoupling at the motion direction and 'temperature drift effect' are effectively avoided, moreover the structure is simple and compact, the positioning accuracy is high, the working range of 1mm*1mm*50mu m can be realized, the precise micromotion platform and the control method thereof can be widely used in the fields requiring precise operation and manufacturing, such as bioengineering, optical fiber butt joint.

Description

technical field [0001] The invention relates to a three-translational micro-motion platform and a square control method thereof, in particular to a large-stroke three-translation orthogonal decoupling precision micro-motion platform and a control method thereof. Background technique [0002] Precision positioning technology is one of the key technologies of modern advanced manufacturing technology, and it is widely used in ultra-precision machining, micromanipulation, biomedical engineering and other fields that require fine manipulation. As one of the key equipment, the precision micro-motion platform plays an extremely important role in the precision positioning system. [0003] In 1962, Ellis, a foreign scholar, proposed to use a parallel mechanism as the mechanism form of the piezoelectric ceramic micro-manipulator, and carried out related experiments in microsurgery and biotechnology. Hara and Hemini studied planar three-degree-of-freedom and six-degree-of-freedom micr...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a large-stroke three-translation orthogonal decoupling precision micro-motion platform and its control method, to solve the problem that the precision micro-motion platform is mostly measured by grating sensors, capacitive sensors or laser interferometers, but these detection methods Most of them are limited by the installation space or have strict requirements on the environment

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