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A cassette and tension belt technology, which is used in the field of cassettes for transporting or storing substrates, can solve the problems of no robotic arm, random access, and insertion of the robotic arm.
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[0039] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:
[0040] A number of implementations of the present invention will be disclosed below with the accompanying drawings. For the sake of clarity, many practical details will be described together in the following description. It should be understood, however, that these practical details should not be used to limit the invention. That is, in some embodiments of the present invention, these practical details are unnecessary. In addition, for the sake of simplifying the drawings, some conventional structures and components in the prior art will be shown in a simple and schematic manner in the drawings.
[0041] figure 1 It is a perspective view of a cassette according to an embodiment of the present invention. As shown in the figure, a cassette includes a frame 110 , a tension belt 120 , a tension mechanism 130 and a plurality of ...
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