Semiconductor packaging structure and making method thereof
A packaging structure and semiconductor technology, applied in the fields of semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve the problems affecting the quality of electrical connections, densely interlaced bonding wires, and unfavorable wire bonding, etc. It is not easy to overflow and bridge, increase the quality of electrical connection, and has the effect of wide application range
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[0060] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.
[0061] see Figure 3A to Figure 3G , is a cross-sectional view of the semiconductor package structure and its manufacturing method of the present invention, wherein, Figure 3E' is a top view, Figure 3E is along Figure 3E' Cross-sectional view of line 3E-3E.
[0062] Such as Figure 3A As shown, the metal plate 30 is prepared, the metal plate 30 has an opposite first surface 30a and a second surface 30b, the first surface 30a has a crystal placement area 301 and a plurality of contact pad areas 302; wherein, the metal plate 30 The material can be copper.
[0063] Such as Figure 3B As shown, the metal plate 30 is patterned from the first surface 30a to the second surface 30b, so that the metal plate 30 forms grooves 300 in p...
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