Method for conveying high-flow high-purity liquefied gas

Abstract

The invention discloses a method for conveying high-flow high-purity liquefied gas. In the invention, a liquefied gas storage module, a supercharged module, a liquefied gas conveying pipeline, an evaporator and a pressure regulating module. The method comprises the following steps: educing the liquefied gas from the liquefied gas storage module, so that the liquefied gas enters the supercharged module; knocking the liquefied gas by the supercharged module, and conveying the liquefied gas into the evaporator through the liquefied gas conveying pipeline; vaporizing and heating the liquefied gas in the evaporator; and conveying the heated liquefied gas to a required machine bench when the heated liquefied gas passes through the pressure regulating module and the pressure of the liquefied gas is reduced to the technology requirement. According to the method for conveying high-flow high-purity liquefied gas provided by the invention, the liquefied gas is knocked out by the supercharged module, the liquefied gas is conveyed to the evaporator through the liquefied gas conveying pipeline, the liquefied gas is gasified and heated out of the liquefied gas storage module by adopting the evaporator, the direct heating of the liquefied gas storage module and the long-distance liquid conveying are avoided, and the gas conveying requirements of high purity and large flow rate are satisfied.

Description

technical field [0001] The invention relates to a delivery method of liquefied gas, in particular to a delivery method of large-flow high-purity liquefied gas. Background technique [0002] High-purity liquefied gas is usually liquefied compressed gas stored in steel cylinders, and is an important raw material gas for the semiconductor industry, such as liquid ammonia and liquid chlorine. It is often irritating and flammable, and its purity is generally greater than 99.999%. The transportation of high-purity liquefied gas with a large flow rate (above 100 liters per minute) usually refers to the occasions in which large packaging containers such as Y-steel cylinders, T-steel cylinders, and ISO tank trucks are used in the bulk special gas supply system (BSGS). It is widely used in the production of VLSI chips above 8", the production of solar cells above 100MW, the production of light-emitting diode MOCVD epitaxial wafers, and the production of liquid crystal displays above ...

AI Technical Summary

Problems solved by technology

However, the supply of bulk high-purity liquefied gas also faces certain challenges. For example, bulk gas sources are usually placed outdoors. The impact of temperature and humidity changes on flow, quality and stability needs to be considered, and the impact of the Joule-Thomson effect on the system needs to be overcome. There are high requirements for system reliability and security

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