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Device for measuring ultralow gas flow

A gas flow, extremely small technology, used in the application of thermal effects to detect the direction of fluid flow, etc., to avoid measurement uncertainty

Active Publication Date: 2012-02-08
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The deflation of the vessel wall is limited to 10 -8 Pa.m 3 Accurate measurement of flow below the / s level

Method used

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  • Device for measuring ultralow gas flow
  • Device for measuring ultralow gas flow

Examples

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Embodiment Construction

[0022] figure 1 Shown is a preferred embodiment of the present invention, including gas cylinder 1, fine-tuning valve 2, plenum chamber 3, valve 4, valve 5, valve 6, getter pump 7, valve 8, molecular pump 9, backing pump 10. Capacitance film gauge 11, magnetic levitation rotor gauge 12 and small hole 13. The gas cylinder 1 is connected to the plenum 3 through the fine-tuning valve 2. The small hole 13 is connected to the valve 5 in parallel, and one end is connected to the plenum 3 through the valve 4. The other end of the small hole 13 is connected to the vacuum system, the getter pump 7 is connected to the plenum chamber 3 through the valve 6, the backing pump 10 and the molecular pump 9 are connected in series to the plenum chamber 3 through the valve 8, and the capacitive film gauge 11 and the magnetic levitation rotor gauge 12 are directly connected on the wall of the plenum 3 .

[0023] Among them, the getter pump 7 is a non-evaporable getter pump, the molecular pump 9 ...

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PUM

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Abstract

The invention relates to a device for measuring ultralow gas flow, which comprises a gas bottle, a micrometering valve, a pressure stabilizing chamber, four valves, a getter pump, a molecular pump, a backing pump, a capacitor film gauge, a magnetic suspension rotor gauge and a small hole, wherein the gas bottle is connected with the pressure stabilizing chamber by the micrometering valve; after the small hole is connected in parallel with a valve 2, one end of the small hole is connected with the pressure stabilizing chamber by a valve 1, and the other end of the small hole is connected with a vacuum system; the getter pump is connected with the pressure stabilizing chamber by a valve 3; the backing pump is connected in series with the molecular pump and is connected with the pressure stabilizing chamber by a valve 4; and the capacitor film gauge and the magnetic suspension rotor gauge are directly connected to the wall of the pressure stabilizing chamber. The device for measuring theultralow gas flow adopts the getter pump to carry out gas extraction on the pressure stabilizing chamber and a vacuum pipeline thereof, completely avoids the uncertainty of measurement, which is caused by gas bleeding of the inner walls of the pressure stabilizing chamber and the pipeline, guarantees effective extension of the lower measurement limit and can accurately measure the ultralow gas flow of which the flow value is less than 1*10<-8>Pa.m<3> / s.

Description

technical field [0001] The invention relates to a device and method for measuring extremely small gas flow, in particular to a device and method for measuring extremely small gas flow by using a non-evaporable getter pump. Background technique [0002] In metrology laboratories, high-precision gas micro-flow meters are mostly used to measure and provide known gas flow rates. High-precision gas micro-flow meters mostly use constant-pressure gas micro-flow meters. [0003] The literature "Feng Yan, Cheng Yongjun, Zhang Dixin, etc. Performance test of constant pressure gas micro-flowmeter. Journal of Vacuum Science and Technology 25(3), 2005." When the gas is used, the measurement uncertainty caused by the degassing of the wall is within 10 -8 Pa.m 3 / s magnitude is 0.6%, at 10 -9 Pa.m 3 / s magnitude is 3%. The deflation of the wall is limited to 10 -8 Pa.m 3 Accurate measurement of flow below the / s level. The accurate measurement range of the constant pressure gas mi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F1/68
Inventor 李得天成永军冯焱郭美如徐婕
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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