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Integrally molded fiber microsensor and manufacturing method thereof

A micro-sensor and optical fiber technology, which is applied in the use of optical devices to transmit sensing components, light guides, optics, etc., can solve the problems of being susceptible to external interference, poor stability of planar waveguide-coupled optical fiber sensors, and complex fabrication, and to overcome instability. , the effect of simple structure and high coupling efficiency

Inactive Publication Date: 2011-02-23
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0004] The purpose of the present invention is to solve the shortcomings of poor stability of the planar waveguide coupled optical fiber sensor based on the assembly technology, which is easily disturbed by the outside world and complicated to manufacture, and proposes an integrally formed optical fiber microsensor and its manufacturing method

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  • Integrally molded fiber microsensor and manufacturing method thereof
  • Integrally molded fiber microsensor and manufacturing method thereof
  • Integrally molded fiber microsensor and manufacturing method thereof

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Embodiment Construction

[0022] In order to better illustrate the purpose and advantages of the present invention, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0023] figure 1 It is a schematic diagram of the overall structure of the integrally formed microsensor in this specific embodiment. In this embodiment, Corning's SMF-28e optical fiber is selected, and a groove with a length of 75 microns and a depth of 58 microns is processed on the upper side of any part thereof, and the bottom surface of the groove as a sensing structure is uniformly increased in refractive index. Large flat TLC.

[0024] The specific preparation process of the microsensor of the present embodiment is:

[0025] Step 1, design the length of the fiber groove according to the test requirements;

[0026] Step 2, take a SMF-28e optical fiber 3, remove a section of optical fiber coating layer on the desired part of the ...

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Abstract

The invention relates to an integrally molded fiber microsensor and a manufacturing method and belongs to the technical field of microsensors. In the invention, a groove with a certain width is formed on the lateral surface of a certain part with a coating removed of a fiber by using femtosecond laser pulse technology, the depth of the groove is a little smaller than the distance from the lateral surface to a fiber core so as to guarantee the integrity of the fiber core, and the bottom surface of the groove is an ablation interface lamina with refractivity increasing uniformly; and a scavenging method is adopted in the whole process to remove ablation chips to guarantee the processing effect. The microsensor in the invention has no assembled or movable parts, has the advantages of integral molding, simple structure, high mechanical strength, high coupling effect and the like and overcomes the shortcomings of instability and the like caused by manufacturing and assembling the plane waveguide fiber microsensor separately. The sensor can detect the existence and concentration of specific molecules in the environment and can also be used for detecting temperature or pressure change.

Description

technical field [0001] The invention relates to an integrally formed optical fiber microsensor and a manufacturing method thereof, belonging to the technical field of microsensors. Background technique [0002] Optical fiber sensors have a very broad application background, and the coupling of planar waveguides and optical fibers is a phase-matched resonance mode. This coupling mode can sensitively sense the change of the surface characteristics of the planar waveguide, so that the resonant wavelength and coupling efficiency displayed by the transmission transmission line change, so as to achieve the purpose of testing. This sensor can be used for the detection of refractive index, stress, temperature and humidity, etc., and has a wide range of sensor testing applications. [0003] Usually the planar / slab waveguide coupled fiber optic sensor is an assembly structure, including the selective preparation of the planar waveguide, the side polishing or erosion of the optical fi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/24G01D5/353G02B6/245
Inventor 姜澜赵龙江王素梅
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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