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Yield Predictive Feedback for Control Equipment Engineering Systems

A technology of yield rate and equipment, which is applied in the field of yield rate prediction, can solve the problems of no subsystems and no EES subsystems to provide predicted yield information, etc.

Active Publication Date: 2017-05-03
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in a traditional manufacturing environment, there is no mechanism to provide predictive yield information to the EES subsystem
Nor is it equipped with traditional EES subsystems to perform automated actions in response to yield predictions

Method used

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  • Yield Predictive Feedback for Control Equipment Engineering Systems
  • Yield Predictive Feedback for Control Equipment Engineering Systems
  • Yield Predictive Feedback for Control Equipment Engineering Systems

Examples

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Embodiment Construction

[0033] Described herein is a method and apparatus for performing automated actions in response to yield predictions. A backend yield prediction is generated based on data associated with the manufacturing process, the manufacturing tool, and / or the manufactured product. The back-end yield forecast is communicated to one or more components of the equipment engineering system. In one embodiment, the yield forecast is received by a schedule and dispatch controller. Based on the yield prediction, the weight of the manufacturing tool is adjusted in the routing algorithm. A cost-benefit analysis is calculated that identifies the costs and benefits of manufacturing future products on the manufacturing tool. Based on the cost-benefit analysis, a decision is made as to whether to process future products on the manufacturing tool.

[0034] In the following description, numerous details are set forth. However, it will be understood by those skilled in the art that the present inventi...

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Abstract

A yield forecast is received by the scheduling and dispatch controller, wherein the yield forecast is related to manufacturing tools and products. The weight of the manufacturing tool is adjusted in a routing algorithm based on the yield prediction. calculating a cost-profit analysis that determines the cost and profit of manufacturing the future product on the manufacturing tool; and based on the cost-profit analysis, deciding whether to process the future product on the manufacturing tool.

Description

[0001] related application [0002] This patent application claims priority under 35 U.S.C § 119(e) to U.S. Provisional Application No. 61 / 068,652, filed March 6, 2008, and U.S. Provisional Application No. 61 / 055,954, filed May 23, 2008 rights, both patent applications are hereby incorporated by reference. technical field [0003] Embodiments of the present invention relate to yield prediction, and in particular, to performing automatic actions in response to yield prediction. Background technique [0004] An Equipment Engineering System (EES) manages the processing of products by manufacturing machines. Yield Management System (YMS) uses parameters and electrical test data to analyze yield excursion. When analyzing yield, some traditional YMS utilize data from a fault detection and classification (FDC) system of a traditional equipment engineering system (EES) to provide additional data to yield engineers when analyzing yield. In a limited number of conventional YMSs, d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/418G06Q10/06G06Q50/04
CPCG05B19/41865G05B2219/32306G06Q10/06G06Q50/04Y02P90/02Y02P90/30Y02P90/80
Inventor 詹姆士·莫尼尼古拉斯·沃德理查德·斯塔福德
Owner APPLIED MATERIALS INC
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