Test device for static properties of triaxial miniature accelerometer and test method thereof

Abstract

The invention discloses a test device for the static properties of a triaxial miniature accelerometer and a test method thereof. A motor of the test device supplies power for a test platform, and a transmission shaft is a power transmission device of the motor and transmits power for the rotation of the test platform; a flange is used for fixing a test motherboard and a connecting device on the transmission shaft, a test loop for testing a signal of a device to be tested and outputting a signal is installed on the test motherboard, and a Y-direction locating board and an X-direction locating board are fixed on the connecting device; a spacer block is fixed on one end of each test board, the quantity of the test boards is two, and the test boars are symmetrically arranged in relative to the rotating axis of the motor; locating slots for a device to be tested are installed on the test boards, one end of each locating slot is inserted into an insertion slot, the insertion slots are installed on a rotating device, are respectively arranged on both sides of the X-direction locating board and are connected with the test motherboard through electric wires; and the connecting device is fixed on the flange. The invention can complete the testing of various properties such as sensitivity, zero offset and the like of a device.

Description

technical field [0001] The invention relates to a test technology for the performance of an accelerometer, in particular to a test device and a test method for the static performance of a three-axis miniature accelerometer. Background technique [0002] With the development of Micro Electro-Mechanical System (MEMS, Micro Electro-Mechanical System) technology, many micro accelerometers based on MEMS technology have been released, and are widely used in the fields of automobile, aerospace, communication and so on. However, for micro accelerometers, in the development, packaging and other related manufacturing processes of the device, it will inevitably have an adverse effect on the performance of the device; in addition, after a period of use of the device, due to material aging, temperature, Due to different environmental conditions such as humidity, its performance will inevitably drift to a certain extent, and the error caused after a certain period of accumulation will be ...

AI Technical Summary

Problems solved by technology

However, for micro accelerometers, in the development, packaging and other related manufacturing processes of the device, it will inevitably have an adverse effect on the performance of the device; in addition, after a period of use of the device, due to material aging, temperature, Due to different environmental conditions such as humidity, its performance will inevitably drift to a certain extent, and the error caused after a certain period of accumulation will be quite large. A stable and efficient test platform to calibrate and correct product performance

[0003] The traditional method of calibration and calibration of accelerometer is carried out on the dividing head. On the basis of previous research, North University of China has made corresponding improvements to the test method of axis difference angle. However, its measuring equipment is still relatively Expensive, and it is more suitable for testing the performance of uniaxial accelerometers. For biaxial and triaxial accelerometers, it must be manually disassembled to complete the performance testing and calibration of acceleration in different axes.

This not only reduces the accuracy of the measurement, but it is also difficult to improve the efficiency of the measurement in essence

[0004] The turntable is another commonly used accelerometer test platform, but its structure is relatively complex and the price is very expensive. As for the three-axis turntable that can measure the device performance in three axes, its price is even more expensive

For routine performance testing of accelerometers, the cost of testing can increase substantially

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