Large-caliber off-axis non-spherical measuring and calibration system

Abstract

The invention relates to a large-caliber off-axis non-spherical measuring and calibration system, which comprises an interference instrument, a standard lens, two plane concave lenses, a right-angle reflection prism, a standard plane reflection mirror and an off-axis non-sphere to be measured or calibrated. Standard parallel light which is transmitted from the interference instrument is focused on a focus point of the off-axis non-sphere to be measured or calibrated through the standard lenses, then the standard parallel light becomes parallel light after being reflected by the off-axis non-sphere and is reflected back along the original light path through the standard plane reflection mirror, finally the surface shape of the large-caliber off-axis non-sphere is analyzed and processed by image processing software of the interference instrument so as to complete the measurement of the large-caliber off-axis non-sphere. Narrow beam which is also transmitted from the center of the interference instrument enters the first plane concave lens along the direction of the main light axis, the narrow beam enters the right-angle reflection prism after being transmitted, the narrow beam deflects 90 degrees after being reflected by the right-angle reflection prism to enter the second plane concave lens, the narrow beam is finally emitted through the lowest point and the highest point of the off-axis non-sphere surface vector, and the standard plane reflection mirror is moved, so the beam is returned along the original path, the center of each element can be ensured to stay on the same height, and the geometric parameter measurement and calibration of the large-diameter off-axis non-sphere can be completed according to the known conditions.

Description

technical field [0001] The invention belongs to the technical field of advanced optical manufacturing and detection, and relates to an optical detection system, in particular to an optical mirror detection system with large diameter, large relative diameter and large error range. Background technique [0002] In recent years, with the continuous breakthrough and innovation of human science and technology, contemporary science and technology is facing an insurmountable problem-extreme manufacturing technology. In various extreme environments, it is an important feature in the field of modern high-end science and technology to manufacture devices and functional systems with extreme scales or extremely high functions. One of the specific manifestations is in laser nuclear fusion, satellite cameras, seeker optics and astronomy. Aspherical optical elements used in many fields such as telescopes have larger and larger apertures, and their surface structures have become more and mo...

AI Technical Summary

Problems solved by technology

When testing off-axis aspheric surfaces in foreign countries, complex and precise mechanical positioning systems or complex spatial positioning calculation methods are needed. It is very inconvenient to adjust the optical path during testing, and it is not suitable for off-axis aspheric surfaces that have not been formed during processing in the workshop. test

When testing off-axis aspheric surfaces in China, on the one hand, complex mechanical motion devices are required, but on the other hand, it is impossible to accurately measure off-axis aspheric surfaces, let alone control and detect other parameters of off-axis aspheric surfaces.

At the same time, no matter domestic or foreign, there is no equipment that can detect the surface error of off-axis aspheric surface from fine grinding to polishing process, and there is no system that can calibrate the parameters of off-axis aspheric surface

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