High-precision rapid detection method for micro glass V-groove substrate

Abstract

The invention discloses a high-precision rapid detection method for a micro glass V-groove substrate. The method is that high-precision control is conducted to the total width of V-groove substrates, i.e. when V-groove large-scale blanks are manufactured, the precision standard of the width of all substrates and the precision standard of a V-groove are controlled by adopting the same standard andare recorded in details, then the total width of the substrates corresponding to the width of the relevant V-groove is obtained through calculation only when secondary fusing drawing is conducted, and finally the precision of the total width of the substrates is measured in time to know the precision dimension of the corresponding V-groove. The invention has the advantages that the detection is convenient, the product precision can be indirectly known through the detection of the relevant dimension and thereby the goal of rapid detection is realized. Moreover, when the total width of the substrates is measured, a micrometer is required only for rapid measurement to obtain precise data, so data is fed back in time and the trouble in precision control during drawing is solved.

Description

Technical field: [0001] The invention relates to a high-precision and rapid detection method for a miniature glass V-groove substrate. Background technique: [0002] In the process of producing miniature high-precision glass V-shaped grooves, it is the key to realize precise control to know the precise size of the V-shaped grooves in time. However, since the groove width is only 0.127mm, and there are multiple parallel grooves, for example, the total width of 16 grooves reaches 2.032mm, and the distance error between grooves is required to be controlled within 0.5 microns, which can be detected by microscope As a result, it is time-consuming, coupled with the large-scale microscope window is very small, only 5 to 6 grooves can be seen at a time, and it cannot provide fast feedback to production control, which affects quality control. Invention content: [0003] The object of the present invention is to provide a high-precision and rapid detection method for micro-glass V-...

AI Technical Summary

Problems solved by technology

However, since the groove width is only 0.127mm, and there are multiple parallel grooves, for example, the total width of 16 grooves reaches 2.032mm, and the distance error between grooves is required to be controlled within 0.5 microns, which can be detected by microscope The result, but time consuming, coupled with the large scale microscope window is very small, only 5 to 6 grooves can be seen at a time, which cannot provide fast feedback to production control and affects quality control