Nano-precision six-freedom-degree magnetic suspension jiggle station and application

Abstract

The invention discloses a nano-precision six-freedom-degree magnetic suspension jiggle station and application. The jiggle station is mainly applied to semiconductor photoetching equipment. The jiggle station comprises a cross stand and four two-freedom-degree actuators. Each two-freedom-degree actuator comprises permanent magnets polarized along the vertical direction, a horizontal force coil and a vertical force coil, wherein the permanent magnet is fixed at the tail end of the cross stand, and the horizontal force coil and the vertical force coil are arranged on the lateral surface and the underside of the permanent magnet respectively and keep a clearance with the permanent magnet; the cross stand and four permanent magnets polarized along the vertical direction form a rotor of the jiggle station; the horizontal force coil and the vertical force coil are fixed by a coil framework respectively to form a stator of the jiggle station; and the stator is fixed on a pedestal of the jiggle station. The combination of two jiggle stations and a two-freedom-degree large-stroke linear motor can form a positioning system of a double silicon wafer station of a photoetching machine. The jiggle station has the characteristics of simple structure, large driving force, light mass and no cable disturbance, and easily realizes high-precision and high-acceleration six-freedom-degree jiggle.

Description

technical field [0001] The invention relates to a nano-precision six-degree-of-freedom maglev micro-motion stage, which is mainly used in semiconductor photolithography equipment and belongs to the technical field of ultra-precision processing and detection equipment. Background technique [0002] With the development of science and technology, the scale used by human beings in the field of manufacturing has changed from micron to nanometer. In this process, the high-precision micro-motion stage undertakes the task of realizing nanometer-level positioning and processing. Nano-precision micro-motion stage generally refers to a motion platform with a stroke of millimeters and a precision of nanometers. According to the development process of nano-precision micro-motion stage drive technology and support technology, there are mainly: piezoelectric ceramic drive, flexible hinge support micro-stage, short-stroke voice coil motor drive, air bearing micro-stage, and Lorentz motor ...

AI Technical Summary

Problems solved by technology

However, the six-degree-of-freedom micro-motion table adopts a combined structure with three degrees of freedom in the horizontal direction and three degrees of freedom in the vertical direction, and uses two layers of permanent magnets in the horizontal direction, and three short-stroke voice coil motors in the vertical direction. As a result, the structure of the six-degree-of-freedom micro-motion table is still relatively complicated

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